Photolithography plays a pivotal role in fabricating high-resolution patterns of lead halide perovskite nanocrystals (PNCs). However, the ionic nature of PNCs renders them sensitive to the complex solvents used during the etching and developing process, posing an enduring challenge in photolithography. Here, we introduce a facile and reproducible gas-developing-guided photolithography for the high-resolution micropatterning of MAPbBr₃ PNCs based on the intrinsic low formation energy of PNCs. Initially, PbBr₂ micropatterns are formed via UVC light-driven debromination, subsequently transforming into highly photoluminescent MAPbBr₃ PNC micropatterns upon developing methylamine gas. This system achieves a remarkable resolution of up to 2 μm. Furthermore, the resulting MAPbBr₃ PNC micropatterns exhibit excellent stability against light, heat, water, and organic vapors, maintaining 90% optical performance even after immersion in water for 60 days. These micropatterns have been successfully applied in anticounterfeiting with high capacity. The ability to directly pattern MAPbBr₃ PNCs using a simple gas-developing process, comparable to conventional complicated solvent-based methods, offers an alternative pathway for manufacturing thin-film devices.

中文翻译：

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MAPbBr3 钙钛矿纳米晶微图案的气体显影引导原位光刻


光刻技术在制造卤化铅钙钛矿纳米晶体 （PNC） 的高分辨率图案中起着关键作用。然而，PNC 的离子性质使它们对蚀刻和显影过程中使用的复杂溶剂敏感，对光刻技术构成了持久的挑战。在这里，我们介绍了一种简单且可重复的气体显影引导光刻，用于基于 PNC 固有的低形成能对 MAPbBr ₃ PNC 进行高分辨率微图形化。最初，PbBr ₂ 微图案是通过 UVC 光驱动的脱溴形成的，随后在产生甲胺气体时转化为高度光致发光的 MAPbBr ₃ PNC 微图案。该系统实现了高达 2 μm 的出色分辨率。此外，所得的 MAPbBr ₃ PNC 微图案对光、热、水和有机蒸气表现出优异的稳定性，即使在水中浸泡 60 天后也能保持 90% 的光学性能。这些微图案已成功应用于高容量的防伪。与传统的复杂溶剂型方法相比，使用简单的气体显影工艺直接对 MAPbBr ₃ PNC 进行图案化的能力为制造薄膜器件提供了另一种途径。