Nanometer Interlaced Displacement Metrology Using Diffractive Pancharatnam-Berry and Detour Phase Metasurfaces,ACS Photonics

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Nanometer Interlaced Displacement Metrology Using Diffractive Pancharatnam-Berry and Detour Phase Metasurfaces
ACS Photonics ( IF 6.5 ) Pub Date : 2024-11-30 , DOI: 10.1021/acsphotonics.4c01451
Nick Feldman _{1,

2} , Kian M M Goeloe ₁ , Arie J den Boef _{2,

3,

4} , Lyubov V Amitonova _{2,

3} , A Femius Koenderink ₁

Affiliation

Resolving structural misalignments on the nanoscale is of utmost importance in areas such as semiconductor device manufacturing. Metaphotonics provides a powerful toolbox to efficiently transduce information on the nanoscale into measurable far-field observables. In this work, we propose and demonstrate a novel interlaced displacement sensing platform based on diffractive anisotropic metasurfaces combined with polarimetric Fourier microscopy capable of resolving a few nanometer displacements within a device layer. We show that the sensing mechanism relies on an interplay of Pancharatnam-Berry and detour phase shifts and argue how nanoscale displacements are transduced into specific polarization signatures in the diffraction orders. We discuss efficient measurement protocols suitable for high-speed metrology applications and lay out optimization strategies for maximal sensing responsivity. Finally, we show that the proposed platform is capable of resolving arbitrary two-dimensional displacements on a device.

中文翻译：

使用衍射 Pancharatnam-Berry 和绕行相超表面的纳米隔行位移计量

解决纳米级的结构错位在半导体器件制造等领域至关重要。超光子学提供了一个强大的工具箱，可以有效地将纳米级信息转化为可测量的远场可观察物。在这项工作中，我们提出并展示了一种基于衍射各向异性超表面的新型交错位移传感平台，该平台结合偏振傅里叶显微镜，能够分辨器件层内的几纳米位移。我们表明传感机制依赖于 Pancharatnam-Berry 和绕道相移的相互作用，并论证了纳米级位移如何转化为衍射级的特定极化特征。我们讨论了适用于高速计量应用的高效测量协议，并列出了实现最大传感响应度的优化策略。最后，我们表明所提出的平台能够解析设备上的任意二维位移。

更新日期：2024-11-30

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