For the creation of smaller and smaller electrical devices and fundamental studies, Kelvin Probe Force Microscopy (KPFM) offers a technique that measures the surface potential with nanometer lateral resolution and allows for a more precise understanding of properties such as the work function, the localization of charges and the doping of materials. Despite its obvious potential, the complexity of its implementation is currently a bottleneck for its extensive application. Here, we introduce a step-by-step overview of the different experimental parameters that need to be controlled in PF-KPFM to ensure their useful effect on the measured contact potential difference.

中文翻译：

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脉冲力开尔文探针力显微镜中的仪器参数教程


为了创建越来越小的电气设备和基础研究，开尔文探针力显微镜 （KPFM） 提供了一种以纳米横向分辨率测量表面电位的技术，并允许更精确地了解功函数、电荷定位和材料掺杂等特性。尽管其潜力显而易见，但其实施的复杂性目前是其广泛应用的瓶颈。在这里，我们逐步概述了需要在 PF-KPFM 中控制的不同实验参数，以确保它们对测得的接触电位差产生有用的影响。