By imitating the natural phenomenon of waves pushing leaves, a compact novel wave-type piezoelectric actuator is proposed in this paper. Compared to traditional inchworm piezoelectric actuators, it combines the clamping unit and driving unit into an arc-shaped flexible driving foot (AFDF). Clamping and driving functions are realized by alternately controlling two ends of the AFDF using two piezoelectric stacks (PESs). One motion unit instead of two makes control simpler, the structure more compact and a faster movement speed. The static model of the AFDF is developed to characterize the mapping laws between structural dimensions and actuator amplification ratios, and the dynamic model represents the relationship between the control signals and move displacements, thus demonstrating the feasibility of the actuator. Finally, a prototype was fabricated, and a testing system was set up to conduct performance evaluations of its motion capabilities. At the driving frequencies of 370 Hz and 380 Hz, the maximum forward and reverse motion speeds can reach 4.345mm/s and 4.537mm/s, respectively. In the range of 0.1–10 N, there is no significant change in motion speed, and it has good stability. Its resolution for forward and reverse motion can reach 106 nm and 109 nm, respectively.

中文翻译：

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通过模仿波浪的运动设计的紧凑结构和高速执行器


通过模仿波浪推动叶片的自然现象，本文提出了一种紧凑的新型波型压电致动器。与传统的尺蠖压电致动器相比，它将夹紧单元和驱动单元组合成一个弧形柔性驱动脚 （AFDF）。通过使用两个压电堆栈 （PES） 交替控制 AFDF 的两端来实现箝位和驱动功能。一个运动单元而不是两个运动单元使控制更简单，结构更紧凑，移动速度更快。开发 AFDF 的静态模型来表征结构尺寸和执行器放大比之间的映射规律，动态模型表示控制信号和移动位移之间的关系，从而证明了执行器的可行性。最后，制造了一个原型，并建立了一个测试系统来对其运动能力进行性能评估。在 370 Hz 和 380 Hz 的驱动频率下，最大正向和反向运动速度分别可以达到 4.345mm/s 和 4.537mm/s。在 0.1–10 N 范围内，运动速度没有显着变化，具有良好的稳定性。其正向和反向运动的分辨率分别可以达到 106 nm 和 109 nm。