In this paper, a high-frequency lamb wave resonator (LWR) with near zero temperature coefficient of frequency (TCF) is designed, fabricated, and measured. The reported resonator is of a bi-layer structure consisting of lithium niobate (LiNbO3 or LN) and silicon dioxide (SiO2), and lithographically patterned aluminum (Al) inter-digitated electrode fingers on top of the bi-layer structure. By adjusting the thickness ratio of LN and SiO2 layers, both the electromechanical coupling (k2) and the TCF, including both TCF at resonant frequency (TCFr) and TCF at anti-resonant frequency (TCFa), of the thickness shear (TS) type LWR are optimized. Experimental results, which are in excellent agreement with theoretical analysis, show that the fabricated 11.6-GHz LWR achieves a k2 of 12.2%, with TCFr and TCFa being −4.2 and −5.4 ppm/K over a temperature range from 30 °C to 85 °C, respectively, demonstrating huge potential in applications for future wireless communication systems above 10 GHz.

中文翻译：

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基于 128°Y 切割 LiNbO3 的近零 TCF 11.6 GHz 兰姆波谐振器


本文设计、制造和测量了一种温度频率系数 （TCF） 接近零的高频兰姆波谐振器 （LWR）。报道的谐振器具有双层结构，由铌酸锂（LiNbO3 或 LN）和二氧化硅 （SiO2） 组成，并在双层结构顶部有光刻图案化的铝 （Al） 叉指。通过调整 LN 和 SiO2 层的厚度比，优化了厚度剪切 （TS） 型 LWR 的机电耦合 （k2） 和 TCF，包括谐振频率的 TCF （TCFr） 和反谐振频率的 TCF （TCFa）。实验结果与理论分析非常吻合，结果表明，在 30 °C 至 85 °C 的温度范围内，制造的 11.6 GHz LWR 实现了 12.2% 的 k2，TCFr 和 TCFa 分别为 -4.2 和 -5.4 ppm/K，显示出未来 10 GHz 以上无线通信系统应用的巨大潜力。