Differential absorption Lidar (DIAL) in the ultraviolet (UV) region is an effective approach for monitoring tropospheric ozone. 4H-SiC single-photon detectors (SPDs) are emergent devices for UV single-photon detection. Here, we demonstrate a 4H-SiC SPD-based ozone DIAL. We design and fabricate the 4H-SiC single-photon avalanche diode with a beveled mesa structure and optimized layer thickness. An active quenching circuit with a quenching time of 1.03 ns is developed to significantly mitigate the afterpulsing effect while enhancing the maximum count rate. After characterization, the SPD exhibits excellent performance with a photon detection efficiency of 16.6% at 266 nm, a dark count rate of 138 kcps, a maximum count rate of 13 Mcps, and an afterpulse probability of 2.7% at room temperature. Then, we apply two 4H-SiC SPDs in an ozone DIAL. The measured ozone concentrations at altitudes of 1–3.5 km agree well with the results of a commercial ozone DIAL. Our work provides an alternative solution for general UV Lidar applications.

中文翻译：

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带有 4H-SiC 单光子探测器的差分吸收臭氧激光雷达


紫外 （UV） 区域的差分吸收激光雷达 （DIAL） 是监测对流层臭氧的有效方法。4H-SiC 单光子探测器 （SPD） 是用于紫外单光子检测的新兴器件。在这里，我们展示了基于 4H-SiC SPD 的臭氧 DIAL。我们设计和制造了具有斜面台面结构和优化层厚的 4H-SiC 单光子雪崩二极管。开发了一种淬灭时间为 1.03 ns 的有源淬灭电路，以显着减轻后脉冲效应，同时提高最大计数率。表征后，SPD 表现出优异的性能，在 266 nm 处光子探测效率为 16.6%，暗计数率为 138 kcps，最大计数率为 13 Mcps，室温后脉冲概率为 2.7%。然后，我们在臭氧 DIAL 中应用两个 4H-SiC SPD。在 1-3.5 公里高度测得的臭氧浓度与商业臭氧 DIAL 的结果非常吻合。我们的工作为一般的紫外线激光雷达应用提供了另一种解决方案。