We present a method for the additive fabrication of planar magnetic nanoarrays with minimal surface roughness. Synthesis is accomplished by combining electron-beam lithography, used to generate nanometric patterned masks, with ion implantation in thin films. By implanting 56Fe+ ions, we are able to introduce magnetic functionality in a controlled manner into continuous Pd thin films, achieving 3D spatial resolution down to a few tens of nanometers. Our results demonstrate the application of this technique in fabricating square artificial spin ice lattices, which exhibit well-defined magnetization textures and interactions among the patterned magnetic elements.

中文翻译：

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基于离子注入的磁性超材料


我们提出了一种表面粗糙度最小的平面磁性纳米阵列的增材制造方法。合成是通过将用于生成纳米图案掩模的电子束光刻技术与薄膜中的离子注入相结合来完成的。通过注入 56Fe+ 离子，我们能够以受控方式将磁性功能引入连续的 Pd 薄膜中，实现低至几十纳米的 3D 空间分辨率。我们的结果证明了该技术在制造方形人工自旋冰晶格中的应用，其表现出明确的磁化纹理和图案化磁性元件之间的相互作用。