An UV-activated TiO₂/SnO₂ thin-film oxygen sensor was fabricated by simple sputtering deposition and thermal annealing. It was found that introducing TiO₂ film can obviously increase the response speed of the sensor (∼ 2 fold increase with 20 nm TiO₂ introducing). Moreover, it was found that introducing TiO₂ would lead to the formation of orthorhombic phase of SnO₂, due to the dissolution of Ti into Sn metal. The sensor can detect oxygen in air atmosphere (detection limit of 1 % oxygen concentration) at low operating temperature (92 °C) with good long-term stability, selectivity and anti-humidity. Effects of TiO₂ and SnO₂ thickness on sensing performance were investigated, and related detection mechanism was discussed. To our knowledge, it is the first demonstration that introducing TiO₂ into SnO₂ can improve the O₂ response speed, especially at low operating temperature (92 °C).

中文翻译：

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紫外激活的 TiO2/SnO2 氧传感器，在低温和空气-大气压下操作时具有更高的响应速度


通过简单的溅射沉积和热退火制备了紫外活化的 TiO₂/SnO₂ 薄膜氧传感器。研究发现，引入 TiO₂ 薄膜可以明显提高传感器的响应速度（引入 20 nm TiO₂ 后，响应速度增加 ∼ 2 倍）。此外，研究发现，由于 Ti 溶解成 Sn 金属，引入 TiO₂ 会导致 SnO₂ 形成正交相。该传感器可在低温 （92 °C） 下检测空气中的氧气（检测限为 1 % 氧气浓度），具有良好的长期稳定性、选择性和抗湿性。研究了 TiO₂ 和 SnO₂ 厚度对传感性能的影响，并讨论了相关的检测机制。据我们所知，这是首次证明将 TiO₂ 引入 SnO₂ 可以提高 O₂ 响应速度，尤其是在低工作温度 （92 °C） 下。