Multi-scale structures are ubiquitous in biological systems. However, manufacturing man-made structures with controllable features spanning multiple length scales, particularly down to nanoscale features, is very challenging, which seriously impacts their collective properties. Here we introduce an aluminium-based three-dimensional lithography that combines sequential nano–micro–macro-imprinting and anodization of multi-scale anodic aluminium oxide templates to manufacture well-defined multi-scale structures, using various materials. The high-fidelity nano-patterns and micro-patterns were facilitated by the surface work hardening phenomenon, where the nano-patterns can be further fine-tailored by anodization to have high-aspect-ratio and tunable nano-holes. Based on the aluminium-based three-dimensional lithography, multi-scale materials across length scales of at least 10⁷ orders of magnitude were precisely fabricated, including carbon, semiconductors and metals. We integrated pressure sensors and biosensors with superior and customizable performances by tailoring the multi-scale carbon networks on different length scales from nanofibres and micropyramids to macrodome arrays. This work provides a versatile technique for prototyping on-demand multi-scale structures and materials to explore desirable mechanical and physical properties.

多尺度结构在生物系统中无处不在。然而，制造具有跨越多个长度尺度的可控特征的人造结构，特别是纳米级特征，非常具有挑战性，这严重影响了它们的集体特性。在这里，我们介绍了一种基于铝的三维光刻技术，它结合了多尺度阳极氧化铝模板的顺序纳米-微观-宏观压印和阳极氧化，以使用各种材料制造定义明确的多尺度结构。高保真纳米模型和微模型是由表面加工硬化现象促进的，其中纳米模型可以通过阳极氧化进一步精细定制，以获得高纵横比和可调纳米孔。基于铝基三维光刻技术，精确制造了至少 10^{到 7} 个数量级的长度尺度的多尺度材料，包括碳、半导体和金属。我们通过在从纳米纤维和微金字塔到大圆顶阵列的不同长度尺度上定制多尺度碳网络，将压力传感器和生物传感器与卓越且可定制的性能集成在一起。这项工作提供了一种多功能技术，用于按需制作多尺度结构和材料的原型，以探索理想的机械和物理特性。