Metasurface‐based flat optics has a great potential to replace conventional bulky and heavy optical elements, consistent with the trend of miniaturizing optical elements. One of the trends is to broaden the operating area of the metasurface. The previous approaches are focused on expanding the metasurface area, which has intrinsic manufacturing and optical limitations. Here, this work presents the fabrication of wafer‐scale metalens arrays, and demonstrates the Gabor superlens composed of the metalens arrays, which behaves optically like a large lens system. A pair of fabricated 8‐inch‐sized metalens arrays are used to float the large‐area display, producing a real image in the air. This superlens is easily manufactured in a high‐throughput and cost‐effective manner using an argon fluoride dry scanner and a single reticle. Their capability for diffraction‐limited focusing and imaging is demonstrated. Considering the groundbreaking nature of imaging a large‐area display through the metalens arrays, this work shows a great potential for scaling up the optical display systems in a simple manner.

中文翻译：

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采用晶圆级制造的超透镜阵列的大面积浮动显示器


基于超表面的平面光学元件具有巨大的潜力，可以取代传统的笨重和沉重的光学元件，这与光学元件小型化的趋势一致。其中一个趋势是扩大超表面的工作区域。以前的方法侧重于扩大超表面面积，这具有固有的制造和光学限制。在这里，这项工作介绍了晶圆级超透镜阵列的制造，并展示了由超透镜阵列组成的 Gabor 超透镜，其光学行为类似于大型透镜系统。一对制造的 8 英寸尺寸的超透镜阵列用于浮动大面积显示器，在空中产生真实图像。这种超级透镜使用氟化氩干式扫描仪和单个标线即可轻松以高通量和经济高效的方式制造。证明了它们进行衍射极限聚焦和成像的能力。考虑到通过超透镜阵列对大面积显示器进行成像的开创性，这项工作显示了以简单的方式扩展光学显示系统的巨大潜力。