High sensitivity at low frequencies is required by many vibration monitoring scenarios, yet commercial piezoelectric vibration sensors often lack adequate sensitivity in this range. This work introduces a novel non-contact triboelectric vibration sensor featuring a spiral floating electrode structure (SFE-TEVS), achieving an impressive sensitivity of 100 V/g, 500 times higher than commercial piezoelectric vibration sensors and operating across a broad frequency range (1–1000 Hz). The non-contact design and integrated structure contribute to durability and maintain stable performance over 300,000 cycles. Additionally, the SFE-TEVS demonstrates excellent acceleration linearity (R² = 99.95 %) and frequency consistency, both of which are consistent with the results of theoretical analysis. Thus, it was employed to monitor low-frequency active seismic signals and machinery operating states. The SFE-TEVS was further fabricated into a hydrophone for monitoring very-low frequency underwater acoustic waves. It exhibited a sensitivity far superior to the commercial 8105 hydrophone in a 10–100 Hz frequency range, surpassing it by 31.7 dB at 65 Hz, meanwhile exhibiting excellent directivity. The SFE-TEVS combines high sensitivity, broad frequency range, and remarkable durability, showcasing the great potential for active seismic, machinery vibration, and underwater acoustics monitoring, further advancing the application of TENG in these fields.

中文翻译：

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一种采用螺旋浮动电极结构的非接触式摩擦电振动传感器，用于低频振动监测


许多振动监测场景都需要低频下的高灵敏度，但商用压电振动传感器在此范围内通常缺乏足够的灵敏度。这项工作介绍了一种新型非接触式摩擦电振动传感器，该传感器具有螺旋浮动电极结构 （SFE-TEVS），可实现令人印象深刻的 100 V/g 灵敏度，比商用压电振动传感器高 500 倍，并在很宽的频率范围 （1–1000 Hz） 内工作。非接触式设计和集成结构有助于提高耐用性，并在 300,000 次循环中保持稳定的性能。此外，SFE-TEVS 表现出优异的加速度线性度 （R² = 99.95 %） 和频率一致性，这两者都与理论分析结果一致。因此，它被用于监测低频主动地震信号和机械运行状态。SFE-TEVS 被进一步制成水听器，用于监测极低频水声波。在 10–100 Hz 频率范围内，它的灵敏度远优于商用 8105 水听器，在 65 Hz 时比其高出 31.7 dB，同时表现出出色的方向性。SFE-TEVS 结合了高灵敏度、宽频率范围和卓越的耐用性，展示了主动地震、机械振动和水声学监测的巨大潜力，进一步推动了 TENG 在这些领域的应用。