The researchers — who are based at Imec and KU Leuven — fabricated transmon-style qubits with aluminium/aluminium oxide/aluminium overlap Josephson junctions using only optical lithography and reactive-ion etching. They characterized 400 qubits and 12,840 Josephson junctions across the entire wafer, reporting a yield of 98.25% and a time-averaged median relaxation time of 75 μs. The ageing of the Josephson junctions after storage in a cleanroom at room temperature also showed little variation in the qubit frequency after 151 days, which was attributed to the absence of any organic photoresist (and thus carbon impurities) during the fabrication.

Original reference: Nature 634, 74–79 (2024)

研究人员位于 Imec 和鲁汶大学，仅使用光学光刻和反应离子蚀刻技术制造了铝/氧化铝/铝重叠约瑟夫森结的 transmon 型量子比特。他们表征了整个晶圆上的 400 个量子比特和 12,840 个约瑟夫森结，报告称良率为 98.25%，时间平均中位弛豫时间为 75 μs。在室温洁净室中储存后，约瑟夫森结的老化也表明 151 天后量子比特频率几乎没有变化，这是由于在制造过程中没有任何有机光刻胶（以及碳杂质）。

Original reference: Nature 634, 74–79 (2024) 重试    设置更换其他翻译服务。若您是Pro会员，可以选择使用更为稳定的 DeepL, OpenAI, Claude 或 Gemini 翻译服务（点此免费体验）。 另外，您也可能需要检查您的网络或代理设置。

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