<br>基于 CVD 生长的 WSe2 2D 薄膜的阻抗湿度传感器,ACS Applied Electronic Materials

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基于 CVD 生长的 WSe2 2D 薄膜的阻抗湿度传感器
ACS Applied Electronic Materials ( IF 4.3 ) Pub Date : 2024-10-17 , DOI: 10.1021/acsaelm.4c00863
Jolly Bhadra ₁ , Lucas M. Sassi ₂ , Eliezer Fernando Oliveira _{2,

3,

4} , Jordan A. Hachtel ₅ , Hemalatha Parangusan ₁ , Shoaib Alam Mallick ₁ , Zubair Ahmad ₁ , Douglas S. Galvao _{4,

6} , Anand B. Puthirath ₂ , Robert Vajtai ₂ , Pulickel M. Ajayan ₂ , Noora Al-Thani ₁

Affiliation

基于 2D 材料的平面器件因其超薄特性和增加的表面积而具有高灵敏度，因此在气体和湿度传感器应用中受到追捧。在此，制造了基于 2D WSe₂ 薄膜的规划器设备，以评估它们在湿度传感器中的潜在应用性能。通过拉曼光谱、光致发光、光学显微镜和扫描电子显微镜（SEM）技术研究了 WSe₂ 传感薄膜的结构和形貌。使用电流-电压（I-V）、相对阻抗和复数总阻抗（电化学阻抗谱，EIS）技术评估 2D WSe₂ 薄膜的相对湿度相关传感性能。该传感器在 18 个月的研究期间显示出非常稳定和可重复的性能。基于 WSe₂ 的阻抗传感器的响应和恢复时间分别为 40 和 30 s。WSe₂ 传感器在较低湿度水平（50% RH）下表现出 2 ± 1% 的最小滞后，在相对湿度水平（70% RH）下表现出大约 8 ± 2% 的最大滞后。在对任何材料进行初步研究以探索其在湿度传感器中的应用潜力时，该磁滞值都在可接受的范围内。密度泛函理论（DFT）分析与 WSe₂ 样品的水分子相互作用，以更好地了解器件的传感机制。

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An Impedance Humidity Sensor Based on CVD Grown WSe2 2D Films

2D materials-based planar devices have been sought after for gas and humidity sensor applications owing to their high sensitivity due to their ultrathin nature and increased surface area. Herein, 2D WSe₂ films-based planner devices were fabricated to evaluate their performance for potential application in humidity sensors. The structure and morphology of the WSe₂ sensing films were studied by Raman spectroscopy, photoluminescence, optical microscopy, and scanning electron microscopy (SEM) techniques. The relative humidity-dependent sensing performances of the 2D WSe₂ films were evaluated using current–voltage (I–V), relative impedance, and complex total impedance (electrochemical impedance spectroscopy, EIS) techniques. This sensor showed a very stable and repeatable performance investigated over the period of 18 months. The response and recovery times of the WSe₂-based impedance sensors were found to be 40 and 30 s, respectively. The WSe₂ sensor exhibits a 2 ± 1% minimum hysteresis at a lower humidity level (50% RH) and around 8 ± 2% maximum hysteresis at relative humidity level (70% RH). This value of hysteresis is in the acceptable range during the initial investigation of any material to explore its potential for application in humidity sensors. The density functional theory (DFT) analysis was performed with the interaction from water molecules of the WSe₂ sample for a better understanding of the sensing mechanism of devices.

更新日期：2024-10-17

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