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Non-volatile photonic-electronic memory via 3D monolithic ferroelectric-silicon ring resonator
Light: Science & Applications ( IF 20.6 ) Pub Date : 2024-09-26 , DOI: 10.1038/s41377-024-01625-9 Hang Chen
中文翻译:
通过 3D 单片铁电硅环谐振器实现非易失性光子电子存储器
更新日期:2024-09-26
Light: Science & Applications ( IF 20.6 ) Pub Date : 2024-09-26 , DOI: 10.1038/s41377-024-01625-9 Hang Chen
A novel non-volatile photonic-electronic memory, 3D integrating an Al-doped HfO2 ferroelectric thin film onto a silicon photonic platform using fully compatible electronic and photonic fabrication processes, enables electrically/optically programmable, non-destructively readable, and multi-level storage functions.
中文翻译:
通过 3D 单片铁电硅环谐振器实现非易失性光子电子存储器
一种新型非易失性光子电子存储器,使用完全兼容的电子和光子制造工艺将掺铝 HfO 2铁电薄膜 3D 集成到硅光子平台上,可实现电/光可编程、非破坏性可读和多级存储功能。