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The shift–rotation absolute testing method based on autocollimation
Optical Review ( IF 1.1 ) Pub Date : 2024-09-25 , DOI: 10.1007/s10043-024-00912-5
Jianke Li, Yongqian Wu, Fengwei Liu, Zhan Tang, Haiyang Quan, Xiaojun Chen

The shift–rotation method is an absolute testing method that has attracted much attention in recent years, and detection accuracy at the subnanometer level has been achieved. However, for flat absolute calibration, the power aberration cannot be calibrated via the traditional shift–rotation absolute testing method. To solve this problem, we propose a shift–rotation absolute testing method based on autocollimation, which detects the tilt error of the tested mirror caused by the external environment and guides the adjustment of the stage to remove it. Simulations and experiments are conducted to prove this theory. A comparison with liquid experiments shows that the autocollimated shift–rotation method can achieve accurate absolute power aberration and can compensate for the shortcomings of the traditional shift–rotation method.



中文翻译:


基于自准直的平移旋转绝对测试方法



平移旋转法是近年来备受关注的绝对检测方法,检测精度已达到亚纳米级别。然而,对于平面绝对校准,无法通过传统的平移-旋转绝对测试方法来校准功率像差。针对这一问题,我们提出了一种基于自准直的平移旋转绝对测试方法,该方法检测外部环境引起的被测镜的倾斜误差,并指导平台的调整将其消除。进行了模拟和实验来证明这一理论。与液体实验的对比表明,自准直平移旋转法能够获得精确的绝对功率像差,可以弥补传统平移旋转法的缺点。

更新日期:2024-09-25
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