The high-resolution and nondestructive co-reference measurement of the inner and outer three-dimensional (3D) surface profiles of laser fusion targets is difficult to achieve. In this study, we propose a laser differential confocal (LDC)–atomic force probe (AFP) method to measure the inner and outer 3D surface profiles of laser fusion targets at a high resolution. This method utilizes the LDC method to detect the deflection of the AFP and exploits the high spatial resolution of the AFP to enhance the spatial resolution of the outer profile measurement. Nondestructive and co-reference measurements of the inner profile of a target were achieved using the tomographic characteristics of the LDC method. Furthermore, by combining multiple repositionings of the target using a horizontal slewing shaft, the inner and outer 3D surface profiles of the target were obtained, along with a power spectrum assessment of the entire surface. The experimental results revealed that the respective axial and lateral resolutions of the outer profile measurement were 0.5 and 1.3 nm, while the respective axial and lateral resolutions of the inner profile measurement were 2.0 nm and approximately 400.0 nm. The repeatabilities of the root-mean-square deviation measurements for the outer and inner profiles of the target were 2.6 and 2.4 nm, respectively. We believe our study provides a promising method for the high-resolution and nondestructive co-reference measurement of the inner and outer 3D profiles of laser fusion targets.

中文翻译：

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一种使用激光差分共聚焦-原子力探针技术对激光聚变目标的内部和外部 3D 表面轮廓进行高分辨率测量方法


激光聚变目标的内部和外部三维 （3D） 表面轮廓的高分辨率和无损共参考测量难以实现。在这项研究中，我们提出了一种激光差分共聚焦 （LDC）-原子力探针 （AFP） 方法，以高分辨率测量激光聚变目标的内部和外部 3D 表面轮廓。该方法利用 LDC 方法检测 AFP 的偏转，并利用 AFP 的高空间分辨率来提高外部轮廓测量的空间分辨率。使用 LDC 方法的断层扫描特性实现目标内部轮廓的无损和共参考测量。此外，通过使用水平回转轴组合目标的多次重新定位，获得了目标的内部和外部 3D 表面轮廓，以及整个表面的功率谱评估。实验结果表明，外部轮廓测量的轴向和横向分辨率分别为 0.5 和 1.3 nm，而内部轮廓测量的轴向和横向分辨率分别为 2.0 nm 和大约 400.0 nm。目标外部轮廓和内部轮廓的均方根偏差测量的重复性分别为 2.6 和 2.4 nm。我们相信我们的研究为激光聚变目标内部和外部 3D 轮廓的高分辨率和无损共参考测量提供了一种有前途的方法。