This study aimed to prepare high-performance flexible and power-generation humidity sensors based on lithium chloride (LiCl) coated on laser-induced porous graphene (LIPG). LIPG was produced on the polyimide film (PI) as a substrate through an ultraviolet laser processing system. By using a primary cell structure, the humidity sensor consisted of Cu and Al electrodes and a LiCl active layer. Humidity sensors based on LiCl/LIPG composites were manufactured using a LiCl concentration of 1.5 mol/L, a PI microdrilling spacing of 1.5 mm, and an electrode gap of 1 mm due to their highest regression coefficient of 0.9866 for output voltage versus relative humidity (HR), the shortest response/recovery times of 17.1/24 s, and maximum response of 0.77 V, respectively. Furthermore, the proposed sensor demonstrated an excellent sensitivity of 8.12 mV/%RH, a small hysteresis of 5.66 % RH, a high long-term stability, high repeatability, and high bendability. In this study, the self-powered sensor was used for the application of non-contact switches and power generation. In addition, this research provided facile and practical technology to fabricate flexible and self-powered humidity sensors.

中文翻译：

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基于 LiCl/LIPG 复合材料的高性能柔性自供电湿度传感器


本研究旨在制备基于激光诱导多孔石墨烯（LIPG）涂层的氯化锂（LiCl）的高性能柔性发电湿度传感器。 LIPG是以聚酰亚胺薄膜（PI）为基材，通过紫外激光加工系统生产而成。通过使用原电池结构，湿度传感器由 Cu 和 Al 电极以及 LiCl 活性层组成。基于 LiCl/LIPG 复合材料的湿度传感器采用 LiCl 浓度为 1.5 mol/L、PI 微钻孔间距为 1.5 mm、电极间隙为 1 mm 制造，因为其输出电压与相对湿度的最高回归系数为 0.9866（ HR），最短响应/恢复时间为 17.1/24 s，最大响应为 0.77 V。此外，所提出的传感器表现出 8.12 mV/%RH 的优异灵敏度、5.66% RH 的小滞后、高长期稳定性、高重复性和高弯曲性。在本研究中，自供电传感器被用于非接触开关和发电的应用。此外，这项研究为制造柔性自供电湿度传感器提供了简便实用的技术。