Nanoelectromechanically Tunable Dielectric Metasurfaces for Reconfigurable Wavefront Shaping,ACS Photonics

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Nanoelectromechanically Tunable Dielectric Metasurfaces for Reconfigurable Wavefront Shaping
ACS Photonics ( IF 6.5 ) Pub Date : 2024-09-05 , DOI: 10.1021/acsphotonics.4c00559
A. Bilgehan Baspinar ₁ , Tianzhe Zheng ₁ , Hyounghan Kwon _{1,

2} , Andrei Faraon _{1,

2}

Affiliation

Active metasurfaces promise lightweight and compact reconfigurable optics. Among many other reconfigurable architectures, nanoelectromechanical effects are one of the most effective tuning methods. Various nanoelectromechanical implementations have been demonstrated, but they generally rely on suspended structures that lead to mechanical fragility. In this work, we propose and computationally investigate an on-substrate design with high aspect ratio doped silicon slabs that can achieve a near-2π phase response in reflection, utilizing a slot mode at telecom wavelength. An amplitude modulation of 80% and a phase modulation of 1.4π can be achieved within 10 V. By adjusting the voltage configuration, switchable beam steering can be achieved reaching up to 58% efficiency utilizing a back-mirror. Beam steering with up to 42% efficiency can be performed by eliminating the back mirror, with the added advantage of easier fabrication. This work paves the way for a solid-state nanoelectromechanical platform for amplitude and phase modulation, wavefront shaping, and beam steering.

中文翻译：

用于可重构波前整形的纳米机电可调谐介电超表面

主动超表面有望实现轻质、紧凑的可重构光学器件。在许多其他可重构架构中，纳米机电效应是最有效的调谐方法之一。各种纳米机电实现已经被证明，但它们通常依赖于导致机械脆弱性的悬挂结构。在这项工作中，我们提出并通过计算研究了一种具有高纵横比掺杂硅板的衬底设计，该设计可以利用电信波长的槽模实现反射中接近 2π 的相位响应。可在 10 V 内实现 80% 的幅度调制和 1.4π 的相位调制。通过调整电压配置，可利用后镜实现可切换的光束控制，效率高达 58%。通过消除后镜，可以实现效率高达 42% 的光束控制，并具有更容易制造的额外优势。这项工作为用于振幅和相位调制、波前整形和光束控制的固态纳米机电平台铺平了道路。

更新日期：2024-09-05

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