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Fabrication of high-Q suspended AlGaAs microresonators for efficient Kerr comb generation
Applied Physics Letters ( IF 3.5 ) Pub Date : 2024-08-29 , DOI: 10.1063/5.0219095
Yuqian Zhang 1 , Changzheng Sun 1 , Bing Xiong 1 , Jian Wang 1 , Zhibiao Hao 1 , Lai Wang 1 , Yanjun Han 1 , Hongtao Li 1 , Yi Luo 1
Affiliation  

AlGaAs is a promising integrated nonlinear photonics material with enormous optical nonlinearity and high refractive index. Nevertheless, presently AlGaAs microring resonators exhibiting high-quality factors and tight optical confinement rely predominantly on wafer bonding techniques, which entail an intricate fabrication process. Here, we present suspended AlGaAs waveguides and resonators as a viable platform for high efficiency integrated nonlinear photonics. The suspended microring resonator formed by combined plasma dry etching and chemical wet etching exhibits an intrinsic quality factor Q of 2.1×106, corresponding to an optical loss of 0.28 dB/cm, and Kerr comb generation with milliwatt level threshold is recorded. The proposed scheme can be implemented with a relatively simple fabrication process, as it eliminates the need for wafer bonding. Without the hinderance of SiO2 or Al2O3 claddings, the air-clad suspended AlGaAs platform lends itself directly to applications in the mid-infrared region. Our demonstration opens up a prospect for employing AlGaAs devices in integrated nonlinear photonics.

中文翻译:


制造高 Q 悬浮式 AlGaAs 微谐振器,用于高效产生 Kerr 梳



AlGaAs 是一种很有前途的集成非线性光子学材料,具有巨大的光学非线性和高折射率。然而,目前表现出高质量因数和严格光学限制的 AlGaAs 微环谐振器主要依赖于晶圆键合技术,这需要复杂的制造工艺。在这里,我们提出了悬浮的 AlGaAs 波导和谐振器作为高效集成非线性光子学的可行平台。由等离子体干法刻蚀和化学湿法刻蚀相结合形成的悬浮式微环谐振器表现出 2.1×106 的本征品质因数 Q,对应于 0.28 dB/cm 的光损耗,并记录了具有毫瓦级阈值的克尔梳的产生。所提出的方案可以通过相对简单的制造工艺来实现,因为它消除了晶圆键合的需要。没有 SiO2 或 Al2O3 包层的阻碍,气包式悬浮 AlGaAs 平台直接适用于中红外区域。我们的演示为在集成非线性光子学中使用 AlGaAs 器件开辟了前景。
更新日期:2024-08-29
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