Micromachined Tunable High-Q Infrared Absorbers Enabled by Free-Standing All-Metallic Metasurfaces,ACS Photonics

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Micromachined Tunable High-Q Infrared Absorbers Enabled by Free-Standing All-Metallic Metasurfaces
ACS Photonics ( IF 6.5 ) Pub Date : 2024-08-23 , DOI: 10.1021/acsphotonics.4c01157
Xiayu Wang _{1,

2} , Chenhang Huang _{1,

2} , Zhenci Sun _{1,

2} , Fengjie Zhu ₃ , Yi Chen ₄ , Xiangyang Wei ₄ , Kebin Fan ₃ , Gaofei Zhang _{1,

2} , Xiaoguang Zhao _{1,

2} , Zheng You _{1,

2}

Affiliation

Tunable narrowband infrared absorbers are appealing for various applications such as thermal emission control, optical sensing, and imaging. In this paper, we present a narrowband metasurface absorber for the long-infrared regime with a high quality factor and a wide tuning range mediated by integrating complementary metasurfaces with the Fabry–Perot cavity. The absorber features a tunable air spacer and a free-standing all-metallic metasurface membrane. The absorption response may be modulated by continuously altering the thickness of the air gap. The absence of lossy, dielectric spacer materials and the substrate substantially decreases the absorption bandwidth. The absorption performance in the band of 8.5–14 μm was theoretically analyzed using the corrected interference theory and experimentally demonstrated by a series of micromachined devices. We further constructed a micromachined, electrically tunable device for dynamic manipulation by integrating an electrostatic actuator to control the air gap. The implementation of the infrared absorber is fully compatible with the standard micromachining process, indicating a potential for mass production. Our design provides a promising platform for miniaturized, dynamic infrared metadevices.

中文翻译：

由独立式全金属超表面实现的微机械可调谐高 Q 红外吸收器

可调谐窄带红外吸收器对于热发射控制、光学传感和成像等各种应用都很有吸引力。在本文中，我们提出了一种用于长红外区域的窄带超表面吸收器，通过将互补超表面与法布里-珀罗腔集成，具有高品质因数和宽调谐范围。该吸波器具有可调空气垫片和独立式全金属超表面膜。可以通过连续改变气隙的厚度来调节吸收响应。不存在有损耗的介电间隔材料和基板显着降低了吸收带宽。使用校正干涉理论对8.5-14μm波段的吸收性能进行了理论分析，并通过一系列微机械装置进行了实验证明。我们进一步构建了一种微机械、电可调装置，通过集成静电执行器来控制气隙，进行动态操纵。红外吸收器的实现与标准微加工工艺完全兼容，表明具有大规模生产的潜力。我们的设计为小型化动态红外元设备提供了一个有前景的平台。

更新日期：2024-08-23

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