Magnet-Assisted GaN Monolithically Integrated Device for Optical Three-Axis Motion Sensing,ACS Photonics

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Magnet-Assisted GaN Monolithically Integrated Device for Optical Three-Axis Motion Sensing
ACS Photonics ( IF 6.5 ) Pub Date : 2024-08-13 , DOI: 10.1021/acsphotonics.4c00945
Zecong Liu _{1,

2} , Tingxuan Chen _{1,

3} , Ling Zhu ₃ , Xun Guan ₂ , Kwai Hei Li ₁

Affiliation

Motion sensors, capable of detecting acceleration and inclination along the three axes, are essential in emerging domains of robotics, autonomous vehicles, and virtual reality technologies. To meet the growing demands for precise and reliable motion tracking in cutting-edge applications, here, a compact three-axis motion sensor is developed utilizing a monolithically integrated GaN-based optoelectronic device with split-type magnets. The sensor demonstrates a linear response across an acceleration measurement range of ±10 g for the X- and Y-axes and ±5 g for the Z-axis. It also exhibits fast response and recovery times of 1.50 and 1.03 ms, respectively, along with a minimum detection limit of 0.035 g. The sensor is capable of precisely detecting the tipping angle and acceleration of the dump truck as well as assessing the posture and motion status of unmanned aerial vehicles. The developed sensor offers promising solutions for advancements in automated vehicle operation and robotic motion.

中文翻译：

用于光学三轴运动传感的磁辅助 GaN 单片集成器件

运动传感器能够检测沿三个轴的加速度和倾斜度，在机器人、自动驾驶车辆和虚拟现实技术等新兴领域中至关重要。为了满足尖端应用中对精确、可靠的运动跟踪不断增长的需求，我们利用带有分体式磁体的单片集成 GaN 基光电器件开发了一种紧凑型三轴运动传感器。该传感器在X轴和Y轴 ±10 g 以及Z轴 ±5 g 的加速度测量范围内表现出线性响应。它还具有分别为 1.50 毫秒和 1.03 毫秒的快速响应和恢复时间，以及 0.035 克的最小检测限。该传感器能够精确检测自卸车的倾翻角度和加速度，评估无人机的姿态和运动状态。开发的传感器为自动车辆操作和机器人运动的进步提供了有前途的解决方案。

更新日期：2024-08-13

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