Nature Nanotechnology ( IF 38.1 ) Pub Date : 2024-08-12 , DOI: 10.1038/s41565-024-01756-5 Tingbiao Guo 1, 2 , Zhi Zhang 1, 3 , Zijian Lin 1, 4 , Jiahan Tian 1 , Yi Jin 1 , Julian Evans 1 , Yinghe Xu 2 , Sailing He 1, 2, 3, 5
Locally addressable nanophotonic devices are essential for modern applications such as light detection, optical imaging, beam steering and displays. Despite recent advances, a versatile solution with a high-speed tuning rate, long-life durability and programmability across multiple pixels remains elusive. Here we introduce a programmable nanophotonic matrix consisting of vanadium dioxide (VO2) cavities on pixelated microheaters that meets all these requirements. The indirect Joule heating of these VO2 cavities can result in pronounced spectral modulation with colour changes and ensures exceptional endurance even after a million switching cycles. Precise control over the thermal dissipation power through a SiO2 layer of an optimized thickness on Si facilitates an ultrafast modulation rate exceeding 70 kHz. We demonstrated a video-rate nanophotonic colour display by electrically addressing a matrix of 12 × 12 pixels. Furthermore, inspired by the unique pixel-level programmability with multiple intermediate states of the spectral pixels, a spatiotemporal modulation concept is introduced for spectrum detection.
中文翻译:
耐用且可编程的光谱像素超快纳米光子矩阵
本地可寻址的纳米光子器件对于光检测、光学成像、光束控制和显示器等现代应用至关重要。尽管最近取得了进展,但具有高速调谐速率、长寿命耐用性和跨多个像素可编程性的多功能解决方案仍然难以捉摸。在这里,我们介绍了一种可编程的纳米光子矩阵,该矩阵由像素化微加热器上的二氧化钒 (VO2) 腔组成,可以满足所有这些要求。这些 VO2 腔的间接焦耳热可以导致明显的光谱调制和颜色变化,并确保即使在 100 万次切换循环后也能保持出色的耐用性。通过在 Si 上优化厚度的 SiO2 层精确控制散热功率,有助于实现超过 70 kHz 的超快调制速率。我们通过对 12 × 12 像素的矩阵进行电气寻址,展示了视频速率的纳米光子彩色显示器。此外,受具有光谱像素多个中间状态的独特像素级可编程性的启发,引入了用于频谱检测的时空调制概念。