In this study, we propose a design methodology for a piezoelectric energy-harvesting device optimized for maximal power generation at a designated frequency using topology optimization. The proposed methodology is adapted to the design of a unimorph-type piezoelectric energy harvester, wherein a piezoelectric film is affixed to a singular side of a silicon cantilever beam. Both the substrate and the piezoelectric film components undergo concurrent optimization. Constraints are imposed to ensure that the resultant design is amenable to microfabrication, with specific emphasis on the etchability of piezoelectric energy harvesters. Several numerical examples are provided to validate the efficacy of the proposed method. The results show that the proposed method yields optimized substrate and piezoelectric designs with an enhanced electromechanical coupling coefficient, while allowing the eigenfrequency of the device and the minimum output voltage to be set to the desired values. Furthermore, the proposed method can provide solutions that satisfy the cross-sectional shape, substrate-dependent, and minimum output voltage constraints. The solutions obtained by the proposed method are manufacturable in the field of microfabrication.

中文翻译：

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考虑可制造性的基于水平集的拓扑优化单压电晶片型悬臂压电能量采集器的优化设计


在这项研究中，我们提出了一种压电能量收集装置的设计方法，该方法使用拓扑优化在指定频率下优化最大发电量。所提出的方法适用于单压电晶片型压电能量收集器的设计，其中压电薄膜固定在硅悬臂梁的单侧。基板和压电薄膜元件同时进行优化。施加限制是为了确保最终的设计适合微加工，特别强调压电能量收集器的可蚀刻性。提供了几个数值例子来验证所提出方法的有效性。结果表明，所提出的方法产生了优化的基板和压电设计，具有增强的机电耦合系数，同时允许将器件的本征频率和最小输出电压设置为所需值。此外，所提出的方法可以提供满足横截面形状、基板相关和最小输出电压约束的解决方案。通过所提出的方法获得的解决方案可在微加工领域制造。