This paper focuses on minimizing the optical reflection on spherical fused silica lenses using femtosecond (fs) laser nanostructuring. A unique type of nanopillar formation has been observed on \(\textrm{SiO}_2\) surfaces possessing antireflective properties when irradiated with a specific number of overlapping pulses, polarization, and fluence levels. Maintaining precise control over these sensitive technological parameters such as defocus and incident angle during the processing of geometrically complex shapes presents a significant challenge. This study proposes a theoretical optical arrangement to address this limitation by the design of a custom scanner system optimized for curved surfaces. The paper details the optimization process of such a bent image space (inverse-hypercentric) optical system using Zemax OpticStudio. Although the practical realization of the arrangement has not been performed, simulations are conducted to prove the functionality of the concept. Furthermore, we propose a practical method for segmented structuring of spherical surfaces based on consecutive repositioning and irradiation using an industrial robotic arm. By constructing the optical model, the necessary resolution of the segmentation has been calculated for a typical F-Theta scanner system and experimental verification has been performed.

本文重点研究如何利用飞秒 (fs) 激光纳米结构最大限度地减少球形熔融石英透镜的光学反射。当受到特定数量的重叠脉冲、偏振和注量水平照射时，在具有抗反射特性的\(\textrm{SiO}_2\)表面上观察到了一种独特类型的纳米柱形成。在处理复杂几何形状的过程中，保持对这些敏感技术参数（例如散焦和入射角）的精确控制是一项重大挑战。本研究提出了一种理论光学布置，通过设计针对曲面优化的定制扫描仪系统来解决这一限制。该论文详细介绍了使用 Zemax OpticStudio 的这种弯曲像空间（逆超中心）光学系统的优化过程。尽管该布置尚未实际实现，但已进行模拟以证明该概念的功能性。此外，我们提出了一种基于使用工业机械臂连续重新定位和照射的球面分段结构的实用方法。通过构建光学模型，计算了典型F-Theta扫描系统所需的分割分辨率，并进行了实验验证。