Several proposed future X-ray missions will require thin (≤0.5 mm thick) mirrors with precise surface figures to maintain high angular resolution (≤0.5 arcsec). To study methods of meeting these requirements, adjustable X-ray optics have been fabricated with thin-film piezoelectric actuators to perform figure correction. The fabrication and actuator performance for an adjustable X-ray mirror that forms a conical approximation to a Wolter-I telescope are reported. The individual responses of actuator cells were measured and shown to induce a figure change of 870 nm peak-to-valley on average. These measured responses were compared with predicted responses generated using a finite-element analysis algorithm. On average, the measured and predicted cell responses agreed to within 60 nm root mean square. A set of representative mirror distortions and the measured cell responses were used to simulate figure corrections and calculate the half-power diameter (HPD, single reflection at 1 keV) achieved. These simulations showed an improvement in 4.5 to 9 arcsec mirrors to 0.5 to 1.5 arcsec HPD. The disagreements between the predicted and measured cells’ performance in actuation and figure correction were attributed to a high spatial frequency metrology error and differences in mirror bonding considerations between the finite-element analysis model and the as-built mirror mount.

中文翻译：

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可调节 X 射线光学器件：薄膜致动器测量和图形校正性能


一些拟议的未来 X 射线任务将需要具有精确表面形状的薄（≤0.5 毫米厚）反射镜，以保持高角分辨率（≤0.5 角秒）。为了研究满足这些要求的方法，使用薄膜压电致动器制造了可调节 X 射线光学器件来执行图形校正。报道了可调节 X 射线镜的制造和执行器性能，该镜形成了 Wolter-I 望远镜的圆锥形近似。测量了执行器细胞的个体响应，结果显示平均峰谷值变化为 870 nm。将这些测量的响应与使用有限元分析算法生成的预测响应进行比较。平均而言，测量和预测的细胞反应在 60 nm 均方根内一致。使用一组代表性的镜子畸变和测量的电池响应来模拟图形校正并计算所实现的半功率直径（HPD，1 keV 下的单次反射）。这些模拟显示 4.5 至 9 角秒反射镜的 HPD 改进为 0.5 至 1.5 角秒。预测和测量的电池在驱动和图形校正方面的性能之间的差异归因于高空间频率计量误差以及有限元分析模型和竣工反射镜安装座之间反射镜粘合考虑因素的差异。