On-chip spectrometers with high compactness and portability enable new applications in scientific research and industrial development. Fourier transform (FT) spectrometers have the potential to realize a high signal-to-noise ratio. Here we propose and demonstrate a generalized design for high-performance on-chip FT spectrometers. The spectrometer is based on the dynamic in-plane reconfiguration of a waveguide coupler enabled by an integrated comb-drive actuator array. The electrostatic actuation intrinsically features ultra-low power consumption. The coupling gap is crucial to the spectral resolution. The in-plane reconfiguration surmounts the lithography accuracy limitation of the coupling gap, boosting the resolution to 0.2 nm for dual spectral spikes over a large bandwidth of 100 nm (1.5–1.6 μm) within a compact footprint of 75 μm×1000 μm. Meanwhile, the in-plane tuning range can be large enough for arbitrary wavelengths to ensure the effectiveness of spectrum reconstruction. As a result, the proposed spectrometer can be easily transplanted to other operation bands by simply scaling the structural parameters. As a proof-of-concept, a mid-infrared spectrometer is further demonstrated with a dual-spike reconstruction resolution of 1.5 nm and a bandwidth of 300 nm (4–4.3 μm).

中文翻译：

---

使用 MEMS 面内重构的高性能、波长可移植片上傅立叶变换光谱仪


片上光谱仪具有高度紧凑性和便携性，可在科学研究和工业开发中实现新的应用。傅里叶变换 (FT) 光谱仪具有实现高信噪比的潜力。在这里，我们提出并演示了高性能片上 FT 光谱仪的通用设计。该光谱仪基于波导耦合器的动态面内重新配置，该波导耦合器由集成梳状驱动致动器阵列实现。静电驱动本质上具有超低功耗的特点。耦合间隙对于光谱分辨率至关重要。面内重新配置克服了耦合间隙的光刻精度限制，在 75 微米的紧凑占地面积内，将 100 nm (1.5–1.6 μm) 大带宽内双光谱尖峰的分辨率提高到 0.2 nm微米×1000微米。同时，面内调谐范围对于任意波长都可以足够大，以保证光谱重建的有效性。因此，通过简单地缩放结构参数，所提出的光谱仪可以很容易地移植到其他操作频段。作为概念验证，中红外光谱仪进一步展示了 1.5 nm 的双尖峰重建分辨率和 300 nm (4–4.3 μm) 的带宽。