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Ohmic contacts on SnO2 produced by hydrogen plasma treatment
Applied Physics Letters ( IF 3.5 ) Pub Date : 2024-07-22 , DOI: 10.1063/5.0205615
I. Chaplygin 1 , Z. Galazka 2 , F. Herklotz 1 , E. V. Lavrov 1
Affiliation  

This study introduces a method for creating Ohmic contacts to tin oxide (SnO2) by subjecting the sample surface to hydrogen plasma treatment at moderate temperatures of about 300 °C. This process generates a surface layer of metallic tin droplets, forming suitable electrical contacts. The contacts exhibit remarkable durability and demonstrate Ohmic behavior down to liquid helium temperatures.

中文翻译:


氢等离子体处理产生的 SnO2 欧姆接触



本研究介绍了一种通过在约 300 °C 的中等温度下对样品表面进行氢等离子体处理来与氧化锡 (SnO2) 建立欧姆接触的方法。该过程产生金属锡滴表面层,形成合适的电接触。这些触点表现出卓越的耐用性,并在液氦温度下表现出欧姆行为。
更新日期:2024-07-22
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