The utilization of the electrostatic spinning process has revolutionized the preparation of dielectric layers for conventional flexible capacitive pressure sensors (CPS), making it possible to prepare sensors with excellent performance that are both ultra-thin and flexible. The introduction of microstructures onto the electrostatically spun dielectric layer has been shown to significantly enhance sensor performance, with the templated method being the prevailing approach. However, this method is costly and prone to damaging the structures during film removal. In this study, we report a novel approach for producing a PVA/phosphoric acid electrostatically spun film with surface conical microstructures, eliminating the need for a template in the fabrication of flexible capacitive pressure sensors (APPS). The APPS with surface conical microstructure was prepared by simply adjusting the parameters of the electrostatic spinning process. Operating on the electric double layer (EDL) sensing mechanism, APPS demonstrated excellent performance. The device exhibited a low limit of detection (LOD) down to 1 Pa, a high sensitivity of 0.54 kPa−1 in the range of 0–70 kPa, and a stable performance over 1200 s load-unload cycle tests. These superior characteristics position the APPS for applications to monitor human physiological indicators and enhance human–computer interaction experiences.

中文翻译：

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基于直接形成圆锥结构的柔性电容式压力传感器的制作方法及各种应用场景


静电纺丝工艺的利用彻底改变了传统柔性电容式压力传感器（CPS）介电层的制备方法，使得制备超薄且柔性的具有优异性能的传感器成为可能。事实证明，在静电旋转介电层上引入微结构可以显着提高传感器性能，其中模板方法是主流方法。然而，这种方法成本高昂，并且在薄膜去除过程中容易损坏结构。在这项研究中，我们报告了一种生产具有表面锥形微结构的PVA/磷酸静电纺丝薄膜的新方法，从而消除了在制造柔性电容式压力传感器（APPS）时对模板的需要。通过简单调整静电纺丝工艺参数，制备出具有表面圆锥形微结构的APPS。 APPS 采用双电层 (EDL) 传感机制，展现出卓越的性能。该装置表现出低至1 Pa的低检测限（LOD）、在0-70 kPa范围内0.54 kPa−1的高灵敏度以及在1200 s加载-卸载循环测试中的稳定性能。这些优越的特性使该应用程序适合监测人体生理指标和增强人机交互体验的应用。