The utilization of the electrostatic spinning process has revolutionized the preparation of dielectric layers for conventional flexible capacitive pressure sensors (CPS), making it possible to prepare sensors with excellent performance that are both ultra-thin and flexible. The introduction of microstructures onto the electrostatically spun dielectric layer has been shown to significantly enhance sensor performance, with the templated method being the prevailing approach. However, this method is costly and prone to damaging the structures during film removal. In this study, we report a novel approach for producing a PVA/phosphoric acid electrostatically spun film with surface conical microstructures, eliminating the need for a template in the fabrication of flexible capacitive pressure sensors (APPS). The APPS with surface conical microstructure was prepared by simply adjusting the parameters of the electrostatic spinning process. Operating on the electric double layer (EDL) sensing mechanism, APPS demonstrated excellent performance. The device exhibited a low limit of detection (LOD) down to 1 Pa, a high sensitivity of 0.54 kPa−1 in the range of 0–70 kPa, and a stable performance over 1200 s load-unload cycle tests. These superior characteristics position the APPS for applications to monitor human physiological indicators and enhance human–computer interaction experiences.

中文翻译：

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基于圆锥形结构的柔性电容式压力传感器的制造方法及各种应用场景


静电纺丝工艺的利用彻底改变了传统柔性电容式压力传感器 （CPS） 的介电层制备，从而可以制备出兼具超薄和柔性的具有优异性能的传感器。在静电纺丝电介质层上引入微结构已被证明可以显著提高传感器性能，模板化方法是主流方法。然而，这种方法成本高昂，并且在去除薄膜时容易损坏结构。在这项研究中，我们报道了一种生产具有表面锥形微结构的 PVA/磷酸静电纺丝薄膜的新方法，在制造柔性电容式压力传感器 （APPS） 时无需模板。通过简单地调整静电纺丝过程的参数来制备具有表面锥形微观结构的 APPS。APPS 在双电层 （EDL） 传感机制上运行，表现出出色的性能。该器件的检测限 （LOD） 低至 1 Pa，在 0-70 kPa 范围内具有 0.54 kPa-1 的高灵敏度，并且在 1200 s 的负载-卸载循环测试中具有稳定的性能。这些卓越的特性使 APPS 能够监测人类生理指标并增强人机交互体验。