Metasurfaces precisely control the amplitude, polarization and phase of light, with applications spanning imaging, sensing, modulation and computing. Three crucial performance metrics of metasurfaces and their constituent resonators are the quality factor (Q factor), mode volume (V_m) and ability to control far-field radiation. Often, resonators face a trade-off between these parameters: a reduction in V_m leads to an equivalent reduction in Q, albeit with more control over radiation. Here we demonstrate that this perceived compromise is not inevitable: high quality factor, subwavelength V_m and controlled dipole-like radiation can be achieved simultaneously. We design high quality factor, very-large-scale-integrated silicon nanoantenna pixels (VINPix) that combine guided mode resonance waveguides with photonic crystal cavities. With optimized nanoantennas, we achieve Q factors exceeding 1,500 with V_m less than 0.1 \({(\lambda /{n}_{{{{\rm{air}}}}})}^{3}\). Each nanoantenna is individually addressable by free-space light and exhibits dipole-like scattering to the far-field. Resonator densities exceeding a million nanoantennas per cm² can be achieved. As a proof-of-concept application, we show spectrometer-free, spatially localized, refractive-index sensing, and fabrication of an 8 mm × 8 mm VINPix array. Our platform provides a foundation for compact, densely multiplexed devices such as spatial light modulators, computational spectrometers and in situ environmental sensors.

超表面精确控制光的振幅、偏振和相位，其应用涵盖成像、传感、调制和计算。超表面及其组成谐振器的三个关键性能指标是品质因数（ Q因数）、模式体积（ V _m ）和控制远场辐射的能力。通常，谐振器面临这些参数之间的权衡： V _m的降低会导致Q的相应降低，尽管对辐射的控制更多。在这里，我们证明这种感知的妥协并非不可避免：高质量因数、亚波长V _m和受控的类偶极子辐射可以同时实现。我们设计了高品质因数、超大规模集成硅纳米天线像素 (VINPix)，将导模谐振波导与光子晶体腔相结合。通过优化的纳米天线，我们的Q因子超过 1,500， V _m小于 0.1 \({(\lambda /{n}_{{{{\rm{air}}}}})}^{3}\) 。每个纳米天线均可通过自由空间光单独寻址，并在远场表现出类似偶极子的散射。可以实现每cm ²超过一百万个纳米天线的谐振器密度。作为概念验证应用，我们展示了无需光谱仪的空间局部折射率传感以及 8 mm × 8 mm VINPix 阵列的制造。我们的平台为紧凑、密集多路复用设备（例如空间光调制器、计算光谱仪和原位环境传感器）奠定了基础。