In semiconductor manufacturing, photo-etching and acid-etching processes play crucial roles in precisely crafting intricate patterns on storage chip wafers. However, these processes generate significant hazardous waste, leading to high disposal costs. Consequently, there has been increased research into cost-effective and environmentally friendly solutions. This study introduces a custom green scheduling framework inspired by sustainable practices in storage chip wafer fabrication. The framework optimizes the coordination of photo-etching and acid-etching processes, taking into account wait time limits and capacity constraints. Additionally, we propose an efficient hybrid meta-heuristic algorithm designed to reduce energy consumption, minimize makespan, and optimize the quantity of acid-etching baths. This approach identifies the most efficient number of acid-etching tanks for various scenarios, significantly reducing waste production. Empirical results demonstrate the algorithm's effectiveness, highlighting its potential for substantial cost savings and waste reduction. By exploring the relationship between the number of acid-etching tanks and makespan, we identify the optimal tank quantity for diverse scenarios. These insights pave the way for enhanced resource efficiency and sustainable practices in semiconductor manufacturing.

中文翻译：

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半导体制造中两阶段光刻和酸刻协作的绿色调度模型


在半导体制造中，光刻和酸刻工艺在存储芯片晶圆上精确制作复杂图案方面发挥着至关重要的作用。然而，这些过程会产生大量危险废物，导致处置成本高昂。因此，人们越来越多地研究具有成本效益和环境友好的解决方案。本研究介绍了一种受存储芯片晶圆制造可持续实践启发的定制绿色调度框架。该框架优化了光刻和酸刻工艺的协调，同时考虑了等待时间限制和容量限制。此外，我们提出了一种高效的混合元启发式算法，旨在减少能耗、最小化完工时间并优化酸蚀浴的数量。这种方法针对各种情况确定了最有效的酸蚀槽数量，从而显着减少了废物的产生。实证结果证明了该算法的有效性，凸显了其大幅节省成本和减少浪费的潜力。通过探索酸蚀槽数量与完工时间之间的关系，我们确定了不同情况下的最佳酸蚀槽数量。这些见解为提高半导体制造的资源效率和可持续实践铺平了道路。