Pt-containing high entropy alloy films (HEAFs), FeCoNiCuPt ( = 0.2, 0.4, 0.6, 0.8, 1.0), have been prepared from multilayer precursors using a two-step method involving magnetron sputtering deposition and vacuum annealing. It has shown that through vacuum annealing at elevated temperatures, complete mixing of the multilayer component can be realized to form uniform high entropy alloy films. By changing their concentrations, the effects of Pt and Cu on microstructure and magnetic properties of FeCoNiCuPt HEAFs have been systematically investigated. The results show that FeCoNiCuPt HEAFs are of disordered FCC solid solution structure, exhibiting soft ferromagnetic behavior and strong in-plane magnetic anisotropy. FeCoNiCuPt HEAFs, with M = 802 emu/cm, H = 52.0 Oe, H = 2.3×10 Oe, and ρ =3.8×10 Ω·m, are suitable for application as the core material of high frequency thin film inductors. It is found that Pt-containing HEAFs show relatively high saturation magnetization due to the fact that Pt-containing HEAFs tend to have larger lattice parameter, which may promote the exchange interaction among the magnetic Fe, Co and Ni atoms in FeCoNiCuPt HEAFs. This result is further supported by DFT calculations.

中文翻译：

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多层前驱体含铂磁性高熵合金薄膜的形成及表征


含 Pt 高熵合金薄膜 (HEAF)、FeCoNiCuPt (= 0.2、0.4、0.6、0.8、1.0) 采用磁控溅射沉积和真空退火的两步法从多层前驱体制备而成。结果表明，通过高温真空退火，可以实现多层组分的完全混合，形成均匀的高熵合金薄膜。通过改变 Pt 和 Cu 的浓度，系统研究了 Pt 和 Cu 对 FeCoNiCuPt HEAF 微观结构和磁性能的影响。结果表明，FeCoNiCuPt HEAF 具有无序的 FCC 固溶体结构，表现出软铁磁行为和强的面内磁各向异性。 FeCoNiCuPt HEAF的M=802emu/cm，H=52.0Oe，H=2.3×10 Oe，ρ=3.8×10 Ω·m，适合作为高频薄膜电感的核心材料。研究发现，含Pt的HEAF表现出相对较高的饱和磁化强度，因为含Pt的HEAF往往具有较大的晶格参数，这可能促进FeCoNiCuPt HEAF中磁性Fe、Co和Ni原子之间的交换相互作用。 DFT 计算进一步支持了这一结果。