The applications of hyperspectral imaging across disciplines such as healthcare, automobiles, forensics, and astronomy are constrained by the requirement for intricate filters and dispersion lenses. By utilization of devices with engineered spectral responses and advanced signal processing techniques, the spectral imaging process can be made more approachable across various fields. We propose a spectral response design method employing photon-trapping surface textures (PTSTs), which eliminates the necessity for external diffraction optics and facilitates system miniaturization. We have developed an analytical model to calculate electromagnetic wave coupling using the effective refractive index of silicon in the presence of PTST. We have extensively validated the model against simulations and experimental data, ensuring the accuracy of our predictions. We observe a strong linear relationship between the peak coupling wavelength and the PTST period along with a moderate proportional relation to the PTST diameters. Additionally, we identify a significant correlation between inter-PTST spacing and wave propagation modes. The experimental validation of the model is conducted using PTST-equipped photodiodes fabricated through complementary metal-oxide-semiconductor-compatible processes. Further, we demonstrate the electrical and optical performance of these PTST-equipped photodiodes to show high speed (response time: 27 ps), high gain (multiplication gain, M: 90), and a low operating voltage (breakdown voltage: ∼ 8.0 V). Last, we utilize the distinctive response of the fabricated PTST-equipped photodiode to simulate hyperspectral imaging, providing a proof of principle. These findings are crucial for the progression of on-chip integration of high-performance spectrometers, guaranteeing real-time data manipulation, and cost-effective production of hyperspectral imaging systems.

中文翻译：

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光电二极管中的周期性表面纹理实现了独特的高光谱响应设计


高光谱成像在医疗保健、汽车、法医学和天文学等学科中的应用受到复杂滤光片和色散透镜的要求的限制。通过利用具有工程光谱响应和先进信号处理技术的设备，可以使光谱成像过程在各个领域变得更加平易近人。我们提出了一种采用光子捕获表面纹理（PTST）的光谱响应设计方法，该方法消除了外部衍射光学器件的必要性，并有利于系统小型化。我们开发了一种分析模型，在 PTST 存在的情况下使用硅的有效折射率来计算电磁波耦合。我们根据模拟和实验数据广泛验证了模型，确保了我们预测的准确性。我们观察到峰值耦合波长和 PTST 周期之间存在很强的线性关系，并且与 PTST 直径之间存在适度的比例关系。此外，我们还发现 PTST 间距和波传播模式之间存在显着相关性。该模型的实验验证是使用通过互补金属氧化物半导体兼容工艺制造的配备 PTST 的光电二极管进行的。此外，我们还展示了这些配备 PTST 的光电二极管的电气和光学性能，以显示高速（响应时间：27 ps）、高增益（倍增增益，M：90）和低工作电压（击穿电压：∼ 8.0 V） ）。最后，我们利用所制造的配备 PTST 的光电二极管的独特响应来模拟高光谱成像，提供原理证明。 这些发现对于高性能光谱仪片上集成的发展、保证实时数据操作以及高光谱成像系统的经济高效生产至关重要。