Thermoelectric devices (TEDs) exhibit much application potential in thermal camouflage and encrypted display recently, requiring that TEDs possess large responsivity, high resolution and rapid response with flexible configuration design, which are hardly realized by the traditional complex fabrication process. In this work, an innovative laser integrated manufacturing technology including double-side-printing selective laser melting (D-SLM) and selective laser ablation (SLA) is developed for the construction of the dynamic thermal platform based on micro TEDs. Through experimentally determining the laser process window assisted by external temperature field regulation, a flat p-type film can be directly transformed from n-type Bi2Te3 film by D-SLM. Thus, high-precision p-n patterns without metal joints are obtained from a single locally modified film, whose thermoelectric properties are further boosted by increasing energy density and introducing a post-annealing process. Then, a dynamic thermal platform with designable shapes and small dimensions can be fabricated rapidly whose working principle is also demonstrated. The thermal platform with 4*4 arrays exhibits imaging function with a pixel size of 2 mm×2 mm, a temperature difference of ∼3 K, and a fast response time of 0.143 s. This work offers an exciting yet effective approach to fabricating TEDs for dynamic thermal programmable information displays.

中文翻译：

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基于激光集成制造辅助的微热电器件的高分辨率动态热编程平台


热电器件（TED）近年来在热伪装和加密显示方面展现出巨大的应用潜力，要求TED具有大响应率、高分辨率和快速响应以及灵活的配置设计，这是传统复杂制造工艺难以实现的。在这项工作中，开发了一种创新的激光集成制造技术，包括双面打印选择性激光熔化（D-SLM）和选择性激光烧蚀（SLA），用于构建基于微型TED的动态热平台。通过实验确定外部温度场调节辅助的激光加工窗口，可以通过D-SLM将n型Bi2Te3薄膜直接转变为平坦的p型薄膜。因此，从单个局部改性薄膜中获得了没有金属接头的高精度pn图案，通过增加能量密度和引入后退火工艺进一步提高了其热电性能。然后，可以快速制造出具有可设计形状和小尺寸的动态热平台，并演示了其工作原理。 4×4阵列热平台具有像素尺寸为2 mm×2 mm、温差为∼3 K、快速响应时间为0.143 s的成像功能。这项工作提供了一种令人兴奋且有效的方法来制造用于动态热可编程信息显示器的 TED。