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Area selective deposition for bottom-up atomic-scale manufacturing
International Journal of Machine Tools and Manufacture ( IF 14.0 ) Pub Date : 2024-05-09 , DOI: 10.1016/j.ijmachtools.2024.104173 Rong Chen , Eryan Gu , Kun Cao , Jingming Zhang
中文翻译:
用于自下而上原子级制造的区域选择性沉积
更新日期:2024-05-09
International Journal of Machine Tools and Manufacture ( IF 14.0 ) Pub Date : 2024-05-09 , DOI: 10.1016/j.ijmachtools.2024.104173 Rong Chen , Eryan Gu , Kun Cao , Jingming Zhang
中文翻译:
用于自下而上原子级制造的区域选择性沉积