We numerically and experimentally developed a cantilever that provided both fast and analog actuation for THz metamaterials (MMs) by properly geometrizing a dimpled tip. Owing to its small size and light mass, the cantilever had a high mechanical resonance at 705 kHz. Cantilever arrays were fabricated with different tip gaps and integrated into a ladder-shaped MM (LS-MM). By changing the tip gap from 0.80 to 0.32 μm, the resonance of the transmittance spectrum changed from 1.235 to 0.795 THz, indicating that the reconfigurable LS-MM was capable of continuously tuning the resonance of the THz wave transmission with the tip gap. Additionally, the dimple served as an anti-stiction structure, providing the cantilever with a fabrication yield of 99.8%. This work shows a practical pathway to high-performance active metamaterials, which holds potential in advanced THz technologies such as 6G communications and fast imaging.

我们通过数值和实验方法开发了一种悬臂，通过正确几何化凹坑尖端，为太赫兹超材料（MM）提供快速和模拟驱动。由于其尺寸小、质量轻，悬臂梁在 705 kHz 下具有较高的机械共振。悬臂阵列具有不同的尖端间隙，并集成到梯形MM（LS-MM）中。通过将尖端间隙从0.80μm改变到0.32μm，透射谱的共振从1.235THz改变到0.795THz，这表明可重构LS-MM能够连续调节太赫兹波传输与尖端间隙的共振。此外，凹坑还充当抗粘连结构，使悬臂梁的制造良率达到 99.8%。这项工作展示了一条通往高性能活性超材料的实用途径，它在 6G 通信和快速成像等先进太赫兹技术中具有潜力。