The use of water-based chemistry in photolithography during semiconductor fabrication is desirable due to its cost-effectiveness and minimal environmental impact, especially considering the large scale of semiconductor production. Despite these benefits, limited research has reported successful demonstrations of water-based photopatterning, particularly for intrinsically water-soluble materials such as Poly(3,4-ethylenedioxythiophene):poly(styrene sulfonate) (PEDOT:PSS) due to significant challenges in achieving selective dissolution during the developing process. In this paper, we propose a method for the direct patterning of PEDOT:PSS in water by introducing an amphiphilic Poly(ethylene glycol)-block-poly(propylene glycol)-block-poly(ethylene glycol) (PEO-PPO-PEO, P123) block copolymer to the PEDOT:PSS film. The addition of the block copolymer enhances the stretchability of the composite film and reduces the hydrophilicity of the film surface, allowing for water absorption only after UV exposure through a photoinitiated reaction with benzophenone. We apply this technique to fabricate tactile and wearable biosensors, both of which benefit from the mechanical stretchability and transparency of PEDOT:PSS. Our method represents a promising solution for water-based photopatterning of hydrophilic materials, with potential for wider applications in semiconductor fabrication.

在半导体制造期间的光刻中使用水基化学物质是可取的，因为它具有成本效益且对环境影响最小，特别是考虑到大规模的半导体生产。尽管有这些好处，但有限的研究报告了水基光图案的成功演示，特别是对于本质上水溶性的材料，如聚（3,4-乙烯二氧噻吩）：聚（苯乙烯磺酸）（PEDOT：PSS），因为实现这一点面临着巨大的挑战显影过程中选择性溶解。在本文中，我们提出了一种通过引入两亲性聚（乙二醇）-嵌段-聚（丙二醇）-嵌段-聚（乙二醇）（PEO-PPO-PEO， P123) 嵌段共聚物到 PEDOT:PSS 薄膜。嵌段共聚物的添加增强了复合膜的拉伸性并降低了膜表面的亲水性，只有在紫外线照射后通过与二苯甲酮的光引发反应才允许吸水。我们应用这种技术来制造触觉和可穿戴生物传感器，这两种传感器都受益于 PEDOT:PSS 的机械拉伸性和透明度。我们的方法代表了一种有前途的亲水材料水基光图案化解决方案，具有在半导体制造中更广泛应用的潜力。