We propose a linear image sensor specialized for the light section method to achieve high-speed and low-latency height measurement. This linear image sensor has pixels in the shape of triangles pointing upward and downward, which allows fast data readout and simple data processing of the cross-sectional profile acquisition. We have confirmed the basic feasibility of the sensor by numerical simulation. We also fabricated a prototype of the proposed sensor with 508 pixels. We conducted height measurement of the vertical translate stage and the step pyramid-shaped object and confirmed that the proposed sensor functions as a sensor for light section method.

中文翻译：

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具有三角形像素几何形状的线性图像传感器，专门用于光切法

我们提出了一种专门用于光切法的线性图像传感器，以实现高速、低延迟的高度测量。该线性图像传感器具有向上和向下的三角形像素，可以快速读取数据并简化横截面轮廓采集的数据处理。我们通过数值模拟证实了该传感器的基本可行性。我们还制作了一个 508 像素传感器的原型。我们对垂直平移台和阶梯金字塔形物体进行了高度测量，并确认所提出的传感器可用作光切法的传感器。