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Highly Sensitive Iontronic Pressure Sensor with Side-by-Side Package Based on Alveoli and Arch Structure
Advanced Science ( IF 14.3 ) Pub Date : 2024-03-15 , DOI: 10.1002/advs.202309407 Zhi Ding 1, 2 , Weijian Li 1 , Weidong Wang 1 , Zhengqian Zhao 1 , Ye Zhu 1 , Baoyin Hou 1 , Lijie Zhu 1 , Ming Chen 1 , Lufeng Che 1, 2
Advanced Science ( IF 14.3 ) Pub Date : 2024-03-15 , DOI: 10.1002/advs.202309407 Zhi Ding 1, 2 , Weijian Li 1 , Weidong Wang 1 , Zhengqian Zhao 1 , Ye Zhu 1 , Baoyin Hou 1 , Lijie Zhu 1 , Ming Chen 1 , Lufeng Che 1, 2
Affiliation
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Flexible pressure sensors play a significant role in wearable devices and electronic skin. Iontronic pressure sensors with high sensitivity, wide measurement range, and high resolution can meet requirements. Based on the significant deformation characteristics of alveoli to improve compressibility, and the ability of the arch to disperse vertical pressure into horizontal thrust to increase contact area, a graded hollow ball arch (GHBA) microstructure is proposed, greatly improving sensitivity. The fabrication of GHBA ingeniously employs a double-sided structure. One side uses mold casting to create convex structures, while the other utilizes the evaporation of moisture during the curing process to form concave structures. At the same time, a novel side-by-side package structure is proposed, ensuring pressure on flexible substrate is maximally transferred to the GHBA microstructure. Within the range of 0.2 Pa–300 kPa, the iontronic pressure sensor achieves a maximum sensitivity of 10 420.8 kPa−1, pressure resolution of 0.1% under the pressure of 100 kPa, and rapid response/recovery time of 40/35 ms. In wearable devices, it is capable of monitoring dumbbell curl exercises and wirelessly correcting sitting positions. In electronic skin, it can non-contactly detect the location of the wind source and achieve object classification prediction when combined with the CNN model.
中文翻译：
基于肺泡和拱形结构的并排封装高灵敏度离子电子压力传感器
柔性压力传感器在可穿戴设备和电子皮肤中发挥着重要作用。离子电子压力传感器灵敏度高、测量范围宽、分辨率高，可以满足要求。基于肺泡的显着变形特征以提高压缩性，以及拱将垂直压力分散为水平推力以增加接触面积的能力，提出了分级空心球拱（GHBA）微结构，大大提高了灵敏度。 GHBA 的制作巧妙地采用了双面结构。一侧使用模具铸造来形成凸形结构，而另一侧则利用固化过程中水分的蒸发来形成凹形结构。同时，提出了一种新颖的并排封装结构，确保柔性基板上的压力最大限度地转移到GHBA微结构上。在0.2 Pa~300 kPa范围内，离子电子压力传感器的最大灵敏度为10 420.8 kPa -1 ，在100 kPa压力下压力分辨率为0.1%，快速响应/恢复时间为40/35 ms。在可穿戴设备中，它能够监控哑铃弯举练习并无线纠正坐姿。在电子皮肤中，与CNN模型结合，可以非接触式检测风源位置，实现物体分类预测。
更新日期：2024-03-15
中文翻译：
基于肺泡和拱形结构的并排封装高灵敏度离子电子压力传感器
柔性压力传感器在可穿戴设备和电子皮肤中发挥着重要作用。离子电子压力传感器灵敏度高、测量范围宽、分辨率高，可以满足要求。基于肺泡的显着变形特征以提高压缩性，以及拱将垂直压力分散为水平推力以增加接触面积的能力，提出了分级空心球拱（GHBA）微结构，大大提高了灵敏度。 GHBA 的制作巧妙地采用了双面结构。一侧使用模具铸造来形成凸形结构，而另一侧则利用固化过程中水分的蒸发来形成凹形结构。同时，提出了一种新颖的并排封装结构，确保柔性基板上的压力最大限度地转移到GHBA微结构上。在0.2 Pa~300 kPa范围内，离子电子压力传感器的最大灵敏度为10 420.8 kPa -1 ，在100 kPa压力下压力分辨率为0.1%，快速响应/恢复时间为40/35 ms。在可穿戴设备中，它能够监控哑铃弯举练习并无线纠正坐姿。在电子皮肤中，与CNN模型结合，可以非接触式检测风源位置，实现物体分类预测。
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