Deformable and miniaturized energy storage devices are essential for powering soft electronics. Herein, we fabricate deformable micro supercapacitors (MSCs) based on eutectic gallium-indium liquid metal (EGaIn) current collectors with integrated graphene. The well-define interdigitated electrode patterning with controlled gap is successfully realized by using the laser ablation because of a strong laser absorption of graphene and EGaIn. By judicious control of gap size between neighboring interdigitated electrodes and mass loading of graphene, we achieve a high areal capacitance (1336 µF cm⁻²) with reliable rate performance. In addition, owing to the intrinsic liquid characteristics of EGaIn current collector, the areal capacitance of fabricated MSC retains 90% of original value even after repetitive folding and 20% stretching up to 1000 cycles. Finally, we successfully integrate deformable MSC with a commercial light-emitting diode to demonstrate the feasibility of MSC as a deformable power source. The fabricated MSCs operate stably under various mechanical deformations, including stretching, folding, twisting, and wrinkling.

可变形和小型化的储能器件对于软电子设备的供电至关重要。在此，我们制造了基于具有集成石墨烯的共晶镓铟液态金属（EGaIn）集流体的可变形微型超级电容器（MSC）。由于石墨烯和EGaIn对激光的强烈吸收，利用激光烧蚀成功实现了具有受控间隙的清晰叉指电极图案。通过明智地控制相邻叉指电极之间的间隙尺寸和石墨烯的质量负载，我们实现了具有可靠倍率性能的高面积电容（1336 µF cm ^-2 ）。此外，由于EGaIn集流体固有的液体特性，即使在重复折叠和20%拉伸长达1000次循环后，所制造的MSC的面积电容仍保持原始值的90%。最后，我们成功地将可变形MSC与商用发光二极管集成，证明了MSC作为可变形电源的可行性。制造的 MSC 在各种机械变形下稳定运行，包括拉伸、折叠、扭曲和起皱。