A Strain-Temperature Integrated Polymer-Derived SiCN Ceramic High Temperature Sensor with Wide-Range and Ultra-Short Response Time,Advanced Functional Materials

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A Strain-Temperature Integrated Polymer-Derived SiCN Ceramic High Temperature Sensor with Wide-Range and Ultra-Short Response Time
Advanced Functional Materials ( IF 18.5 ) Pub Date : 2024-03-13 , DOI: 10.1002/adfm.202400400
Mengmeng Yang ₁ , Chao Ma _{1,

2} , Yibo Hu ₁ , Kang Wang ₁ , Rui Zhao ₁ , Yi Liang ₁ , Daoyang Han ₁ , Hailong Wang ₁ , Rui Zhang ₁ , Gang Shao _{1,

3}

Affiliation

Fabricating strain sensors with high response in a wide temperature and strain range is still a challenge, especially in high temperature harsh environments. Herein, a dual-functional sensor with cantilever beam structure is fabricated using polymer-derived SiCN ceramics, which can be applied for temperature and stain monitor. The performance of the integrated sensor is evaluated from room temperature to 1000 °C and the related sensing mechanism is analyzed. The prepared strain sensor has ultrafast response of 60 ms in the strain range of 0–3500 µε and the maximum strain rate can reach 46 200 µε s⁻¹. Moreover, the sensor has excellent stability and ultra-high sensitivity under high temperature environments. Additionally, the temperature can be detected separately up to 1000 °C without any disturbance. This attractive integration sensor with competitive sensitivity, excellent stability, ultrafast response speed, and broad range, has great potential to detect temperature and strain signals for practical application in high temperature extreme environments.

中文翻译：

一种宽范围、超短响应时间的应变温度集成聚合物衍生 SiCN 陶瓷高温传感器

制造在宽温度和应变范围内具有高响应的应变传感器仍然是一个挑战，特别是在高温恶劣环境下。本文采用聚合物衍生的 SiCN 陶瓷制造了悬臂梁结构的双功能传感器，可应用于温度和污点监测。从室温到1000℃对集成传感器的性能进行了评估，并分析了相关的传感机制。所制备的应变传感器在0~3500 µε应变范围内具有60 ms的超快响应，最大应变率可达46 200 µε s ^-1 。而且该传感器在高温环境下具有优异的稳定性和超高的灵敏度。此外，可以在不受任何干扰的情况下单独检测高达 1000 °C 的温度。这种极具吸引力的集成传感器具有具有竞争力的灵敏度、出色的稳定性、超快的响应速度和广泛的范围，在检测温度和应变信号方面具有巨大的潜力，可在高温极端环境下实际应用。

更新日期：2024-03-13

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