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Simultaneous Determination of Young's Modulus and Density of Ultrathin Low-k Films Using Surface Acoustic Waves
Physica Status Solidi (A) - Applications and Materials Science Pub Date : 2024-02-20 , DOI: 10.1002/pssa.202300860
Li Zhang 1 , Xia Xiao 1 , Jinsong Zhang 1 , Zhuo Liu 1 , Yiting Huang 1
Affiliation  

The nondestructive testing (NDT) of mechanical properties in ultrathin low dielectric constant (low-k) films is a major challenge in integrated circuit manufacturing. Young's modulus and density are closely related parameters for low-k films. This study presents a method for NDT of Young's modulus and density of porous low-k black diamond (SiOC:H, BD) films. A linear frequency modulation (LFM) surface acoustic wave (SAW) interdigital transducer (IDT) with a frequency range of 20–250 MHz is designed to generate SAW signals on the samples. The series of SAW waveforms obtained on the samples are processed to obtain experimental SAW dispersion curves across a broad frequency range. By comparing these experimental curves with theoretical dispersion curves, as well as their first-order derivatives, Young's modulus and density of porous low-k BD films with thicknesses of 100, 300, 500, and 1000 nm are characterized. To verify Young's modulus measurements from the SAW method, a control experiment using nanoindentation is conducted. The results demonstrate that the SAW method can reduce the impact of the substrate and is independent of the film thickness. This study presents a highly accurate measuring method for simultaneous multiparameter evaluation of ultra-thin low-k films.

中文翻译:

使用表面声波同时测定超薄低 k 薄膜的杨氏模量和密度

超薄低介电常数(低k)薄膜机械性能的无损测试(NDT)是集成电路制造中的主要挑战。杨氏模量和密度是低k薄膜密切相关的参数。本研究提出了一种多孔低k黑金刚石 (SiOC:H, BD)薄膜杨氏模量和密度的无损检测方法。频率范围为 20–250 MHz 的线性调频 (LFM) 表面声波 (SAW) 叉指换能器 (IDT) 设计用于在样品上生成 SAW 信号。对样品上获得的一系列 SAW 波形进行处理,以获得宽频率范围内的实验 SAW 色散曲线。通过将这些实验曲线与理论色散曲线及其一阶导数进行比较,表征了厚度为 100、300、500 和 1000 nm 的多孔低k BD 薄膜的杨氏模量和密度。为了验证 SAW 方法的杨氏模量测量结果,进行了使用纳米压痕的对照实验。结果表明,SAW 方法可以减少基材的影响,并且与膜厚度无关。本研究提出了一种高精度测量方法,用于同时评估超薄低k薄膜的多参数。
更新日期:2024-02-20
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