A potential but an underexplored application of FIB_SEM is its ability to image the subsurface microstructure and capability for an associated chemical analysis. In this article, agglomerated microstructures of two model oxide dispersion strengthened alloy systems, consisting of ZrO₂ and Y₂O₃ dispersions, are evaluated to understand its elevated temperature behaviors. The systems under evaluation are relevant as candidate nuclear structural materials for next-generation fast breeder reactors, and FIB_SEM technique is effectively used along with TEM and EDS for a comprehensive understanding of the material microstructure, and the results are discussed. Distinct microstructures are observed for the two systems with a difference in crystallite size distribution and presence of micron-sized dispersoids in Y₂O₃. The varied behavior of dispersoids is discussed in terms of its pre-annealing microstructures, and the superiority of ZrO₂ over Y₂O₃ as a dispersoid for ODS alloys is emphasized.

FIB_SEM 的一个潜在但尚未充分开发的应用是其对地下微观结构进行成像的能力以及进行相关化学分析的能力。在本文中，评估了由 ZrO ₂和 Y ₂ O ₃分散体组成的两种模型氧化物弥散强化合金体系的团聚微观结构，以了解其高温行为。所评估的系统可作为下一代快中子增殖堆的候选核结构材料，FIB_SEM 技术与 TEM 和 EDS 一起有效地使用，以全面了解材料的微观结构，并对结果进行了讨论。观察到两个体系具有不同的微结构，其微晶尺寸分布不同并且Y ₂ O ₃中存在微米级分散体。从预退火微观结构的角度讨论了弥散体的不同行为，并强调了ZrO ₂作为ODS合金弥散体相对于Y ₂ O _{3的优越性。}