Variations in parameters associated with the ambient environment can introduce noise in soft, body-worn sensors. For example, many piezoresistive pressure sensors exhibit a high degree of sensitivity to fluctuations in temperature, thereby requiring active compensation strategies. The research presented here addresses this challenge with a multilayered 3D microsystem design that integrates four piezoresistive sensors in a full-Wheatstone bridge configuration. An optimized layout of the sensors relative to the neutral mechanical plane leads to both an insensitivity to temperature and an increased sensitivity to pressure, relative to previously reported devices that rely on similar operating principles. Integrating this 3D pressure sensor into a soft, flexible electronics platform yields a system capable of real-time, wireless measurements from the surface of the skin. Placement above the radial and carotid arteries yields high-quality waveforms associated with pulsatile blood flow, with quantitative correlations to blood pressure. The results establish the materials and engineering aspects of a technology with broad potential in remote health monitoring.

与周围环境相关的参数变化可能会在柔软的身体佩戴传感器中引入噪声。例如，许多压阻压力传感器对温度波动表现出高度的敏感性，因此需要主动补偿策略。这里介绍的研究通过多层 3D 微系统设计解决了这一挑战，该设计在全惠斯通电桥配置中集成了四个压阻传感器。相对于之前报道的依赖类似操作原理的设备，传感器相对于中性机械平面的优化布局导致对温度不敏感和对压力的敏感度增加。将此 3D 压力传感器集成到柔软、灵活的电子平台中，形成一个能够从皮肤表面进行实时无线测量的系统。放置在桡动脉和颈动脉上方可产生与脉动血流相关的高质量波形，并与血压具有定量相关性。结果确定了一项在远程健康监测方面具有广泛潜力的技术的材料和工程方面。