Scientific Reports ( IF 3.8 ) Pub Date : 2024-01-22 , DOI: 10.1038/s41598-024-52024-4 Ardak Ainabayev 1, 2, 3 , Brian Walls 1, 2 , Daragh Mullarkey 1, 2 , David Caffrey 1, 2 , Karsten Fleischer 4 , Christopher M Smith 1, 2 , Amy McGlinchey 1, 2 , Daniel Casey 1, 2 , Sarah J McCormack 5 , Igor Shvets 1, 2
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High-quality epitaxial p-type V2O3 thin films have been synthesized by spray pyrolysis. The films exhibited excellent electrical performance, with measurable mobility and high carrier concentration. The conductivity of the films varied between 115 and 1079 Scm−1 while the optical transparency of the films ranged from 32 to 65% in the visible region. The observed limitations in thinner films’ mobility were attributed to the nanosized granular structure and the presence of two preferred growth orientations. The 60 nm thick V2O3 film demonstrated a highly competitive transparency-conductivity figure of merit compared to the state-of-the-art.
中文翻译：
通过喷雾热解制备高性能 p 型 V2O3 薄膜，用于透明导电氧化物应用
通过喷雾热解合成了高质量的外延 p 型 V2O3 薄膜。这些薄膜表现出优异的电性能、可测量的迁移率和高载流子浓度。薄膜的电导率在 115 到 1079 Scm-1 之间变化，而薄膜的光学透明度在可见光区域的 32% 到 65% 之间。观察到的较薄薄膜迁移率的局限性归因于纳米级颗粒结构和两个首选生长方向的存在。与最先进的薄膜相比，60 nm 厚的 V2O3 薄膜显示出极具竞争力的透明度-电导率品质因数。
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