Vacuum deposition is promising for large-area, high-throughput production of perovskite solar cells (PSCs). However, the strict low humidity control increases the costs for manufacturing facilities and hinders the large-scale production of PSCs. In this work, a sequential deposition method was used to prepare the perovskite intermediate phase, and the impact of ambient humidity was studied during the annealing process. It is shown that proper humidity has a positive effect on the perovskite layer, which is conducive to accelerate the reaction between organic salts and PbI₂ and improve the surface morphology of the film. The perovskite annealing under 55 % relative humidity exhibits fewer defects and faster carrier transport kinetics. The resulting PSCs, with all layers fabricated adopting vapor deposition, yield a power conversion efficiency (PCE) of 15.01 % for the large area modules of 100 cm² (active area 64.8 cm²). More impressively, the PCE of the unpackaged cell modules remained above 80 % after being placed in ambient air for 1200 h. The results open a promising way for scalable fabrication of humidity-tolerant large-area perovskite solar cell modules and shed light on the industrial production of PSCs.

真空沉积有望大面积、高通量生产钙钛矿太阳能电池（PSC）。然而，严格的低湿度控制增加了制造设备的成本并阻碍了PSC的大规模生产。本工作采用顺序沉积法制备钙钛矿中间相，并研究了退火过程中环境湿度的影响。结果表明，适当的湿度对钙钛矿层有积极的影响，有利于加速有机盐与PbI ₂的反应，改善薄膜的表面形貌。 55% 相对湿度下的钙钛矿退火表现出更少的缺陷和更快的载流子传输动力学。由此产生的PSC，其所有层均采用气相沉积制造，对于100 cm ²的大面积模块（有效面积64.8 cm ²），功率转换效率（PCE）为15.01%。更令人印象深刻的是，未包装的电池组件在环境空气中放置 1200 小时后，PCE 仍保持在 80% 以上。这些结果为耐湿大面积钙钛矿太阳能电池模块的可扩展制造开辟了一条有希望的途径，并为PSC的工业生产提供了线索。