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Reconfiguring nucleation for CVD growth of twisted bilayer MoS2 with a wide range of twist angles
Nature Communications ( IF 14.7 ) Pub Date : 2024-01-17 , DOI: 10.1038/s41467-023-44598-w
Manzhang Xu 1, 2, 3 , Hongjia Ji 1 , Lu Zheng 1, 2, 3 , Weiwei Li 1, 2, 3 , Jing Wang 4 , Hanxin Wang 1 , Lei Luo 1 , Qianbo Lu 1, 2, 3 , Xuetao Gan 4 , Zheng Liu 5, 6, 7 , Xuewen Wang 1, 2, 3 , Wei Huang 1, 2, 3, 8, 9
Affiliation  

Twisted bilayer (TB) transition metal dichalcogenides (TMDCs) beyond TB-graphene are considered an ideal platform for investigating condensed matter physics, due to the moiré superlattices-related peculiar band structures and distinct electronic properties. The growth of large-area and high-quality TB-TMDCs with wide twist angles would be significant for exploring twist angle-dependent physics and applications, but remains challenging to implement. Here, we propose a reconfiguring nucleation chemical vapor deposition (CVD) strategy for directly synthesizing TB-MoS2 with twist angles from 0° to 120°. The twist angles-dependent Moiré periodicity can be clearly observed, and the interlayer coupling shows a strong relationship to the twist angles. Moreover, the yield of TB-MoS2 in bilayer MoS2 and density of TB-MoS2 are significantly improved to 17.2% and 28.9 pieces/mm2 by tailoring gas flow rate and molar ratio of NaCl to MoO3. The proposed reconfiguring nucleation approach opens an avenue for the precise growth of TB-TMDCs for both fundamental research and practical applications.



中文翻译:


重构成核以实现具有宽范围扭转角的扭转双层 MoS2 的 CVD 生长



由于莫尔超晶格相关的奇特能带结构和独特的电子特性,除 TB 石墨烯之外的扭曲双层 (TB) 过渡金属二硫属化物 (TMDC) 被认为是研究凝聚态物理的理想平台。具有宽扭转角的大面积、高质量 TB-TMDC 的生长对于探索扭转角相关的物理和应用具有重要意义,但实施起来仍然具有挑战性。在这里,我们提出了一种重新配置成核化学气相沉积(CVD)策略,用于直接合成扭转角从0°到120°的TB-MoS 2 。可以清楚地观察到与扭转角相关的莫尔周期性,并且层间耦合与扭转角显示出很强的关系。此外,通过调整气体流量和NaCl与MoO 3的摩尔比,双层MoS 2中TB-MoS 2的产率和TB-MoS 2的密度显着提高至17.2%和28.9个/mm 2 。所提出的重新配置成核方法为基础研究和实际应用的 TB-TMDC 的精确生长开辟了道路。

更新日期:2024-01-17
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