Aiming at the lack of stable and reliable electrode materials for high temperature wireless sensors, a solution was proposed to use SiBCN ceramic as thin film electrode. To optimize the conductivity of SiBCN coatings, different conductive fillers were incorporated into the precursor solution to prepare conductive SiBCN coatings and the relationship between the coating process parameters, surface morphology and conductivity was established. The results show that the microstructure of the composite can be adjusted in terms of the HfB₂/CNT ratio to optimize the electrical conductivity. HfB₂ and CNTs are evenly distributed in the coating by adding dispersants and ground SiBCN self-fillers. The electrical conductivity of SiBCN coatings can be greatly enhanced by adding HfB₂ and CNTs fillers. Integrating conductive fillers such as HfB₂ and CNTs can form a diafiltration path and the resistivity of the prepared coating has been determined to be as low as 0.13 ± 0.01 Ω m. The conductivity did not necessarily increase with an increasing amount of fillers. Adding a balanced amount of filler particles to the ceramic matrix is the requirement for optimizing the electrical conductivity of the coating.

针对高温无线传感器缺乏稳定可靠的电极材料的问题，提出了采用SiBCN陶瓷作为薄膜电极的解决方案。为了优化SiBCN涂层的电导率，在前驱体溶液中加入不同的导电填料制备导电SiBCN涂层，并建立了涂层工艺结果表明，可以通过HfB ₂/CNT比率来调整复合材料的微观结构，以优化电导率。通过添加分散剂和研磨的SiBCN自填料，HfB_{2通过添加HfB 2}可以大大提高SiBCN涂层的电导率。_{集成HfB 2}等导电填料可以形成渗滤路径，并且所制备的涂层的电阻率经测定低至0.13±0.01Ωm。电导率不一定随着填料量的增加而增加。在陶瓷基体中添加均衡量的填料颗粒是优化涂层导电性的要求。