<br>纳米机械基座 MEMS 悬臂梁的灵敏度,Materials Today Communications

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纳米机械基座 MEMS 悬臂梁的灵敏度
Materials Today Communications ( IF 3.7 ) Pub Date : 2023-12-21 , DOI: 10.1016/j.mtcomm.2023.107891
Abhay K. Rajak , Ritambhara Dash , Ashwini Kumari , A.S. Bhattacharyya

基于纳米机械谐振器的传感设备因其高频动态行为而被用于医疗诊断。悬臂梁属于纳米机械谐振器的范畴。它也类似于一个谐振器，其形状就像一端夹紧的纳米线。随着纳米线谐振器的表面与体积比因按比例缩小而增加，表面应力在谐振器的机械行为中起着至关重要的作用。压阻式 MEMS 悬臂梁用于挥发性化合物和气体的气相分析。进行了研究以解决与基于生物陶瓷和纳米复合涂层的悬臂谐振器相关的质量敏感性问题和断裂。研究展示了如何确定或调整传感性能。对基座悬臂谐振器进行了有限元建模，其中考虑了与线性悬臂相关的质量灵敏度问题。 MEMS 悬臂结构是使用光刻技术制造的。 SiCN 是一种适用于恶劣工作条件下 MEMS 的材料，沉积在硅基板上，具有高硬度 (20 GPa) 和模量 (220 GPa)。探索了纳米压痕尖端和样品之间发生的导电。根据基座悬臂变形确定 711 MPa 的表面应力，发现样品表面发生的断裂会影响 AFM 纳米压痕中的传导和尖端位移。研究发现针尖的锋利度对 MEMS 应用中有用的针尖-样品传导机制有影响。据报道，与细胞团检测相关的灵敏度受到薄膜沉积应力和表面裂纹形成的影响，这给未来的工作带来了挑战。

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Sensitivity in nanomechanical pedestal MEMS cantilever

Nanomechanical resonator-based sensing devices are used in medical diagnostics based on their high-frequency dynamic behavior. Cantilevers fall into the category of Nanomechanical resonators. It also resembles a resonator whose shape is like that of a nanowire clamped at one end. As the surface-to-volume ratio of a nanowire resonator increases due to scaling down, surface stress plays a crucial role in the mechanical behavior of a resonator. Piezoresistive MEMS cantilevers are used for vapor phase analysis of volatile compounds and gas. Studies were done to address the mass sensitivity issues and fractures associated with bioceramic and nanocomposite coatings-based cantilever resonators. The studies show how the sensing performance can be determined or tuned. Finite Element modelling of a pedestal cantilever resonator was done which takes into consideration the mass sensitivity issues associated with linear cantilevers. MEMS cantilever structures were fabricated using lithographic techniques. SiCN, a suitable material for MEMS in harsh operating conditions were deposited on Silicon substrates showing high hardness (20 GPa) and modulus (220 GPa). The electrical conduction taking place between the nanoindentation tip and sample was explored. The surface stress of 711 MPa was determined based on pedestal cantilever deflections, Fracture taking place on the sample surface was found to affect the conduction and tip displacements in AFM nanoindentations. The sharpness of the tip was found to have an influence on the tip-sample conduction mechanism useful for MEMS applications. The sensitivity associated with cell mass detection was reported to get affected by film deposition stress and formation of surface cracks and puts a challenge for doing future work.

更新日期：2023-12-21

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