In-situ scanning electron microscope (SEM) is essential for investigating materials' properties. In this study, a custom-built in-situ heating system was developed to improve SEM imaging at elevated temperatures. A heater equipped with a double helical tungsten filament was specifically designed to achieve unprecedented high temperatures for heating materials. A bias-voltage control system was proposed to suppress thermal electrons during heating. Additionally, a high-temperature secondary-electron detector was developed and equipped with a variable visible-light filter to mitigate the impact of visible and infrared light at high temperatures. The heater and detector worked within a high vacuum environment with a pressure level below 110 Pa. Two in-situ heating experiments were conducted using the heating system to observe the melting and crystallizing processes of cobalt and the phase transformation of carbon steel. The results exhibited the remarkable capability of the heating system to image at temperatures as high as 1500 °C, offering a resolution of 40 nm. This heater is anticipated to advance materials characterization, providing comprehensive insights into their behavior at high temperatures and opening new avenues for developing material properties.

中文翻译：

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原位扫描电子显微镜高温成像系统的研制与应用


原位扫描电子显微镜 (SEM) 对于研究材料的性能至关重要。在这项研究中，开发了一种定制的原位加热系统，以改善高温下的 SEM 成像。配备双螺旋钨丝的加热器经过专门设计，可实现加热材料前所未有的高温。提出了一种偏置电压控制系统来抑制加热过程中的热电子。此外，还开发了高温二次电子探测器，并配备了可变可见光滤光片，以减轻高温下可见光和红外光的影响。加热器和探测器在压力水平低于110 Pa的高真空环境下工作。利用该加热系统进行了两次原位加热实验，观察钴的熔化和结晶过程以及碳钢的相变。结果展示了加热系统在高达 1500 °C 的温度下成像的卓越能力，提供 40 nm 的分辨率。该加热器预计将促进材料表征，提供对材料在高温下行为的全面了解，并为开发材料性能开辟新途径。