掺杂、应力和厚度对铁电 HfO2 压电响应的影响及其与极化的关系,ACS Applied Electronic Materials

当前位置： X-MOL 学术 › ACS Appl. Electron. Mater. › 论文详情

Our official English website, www.x-mol.net, welcomes your feedback! (Note: you will need to create a separate account there.)

掺杂、应力和厚度对铁电 HfO2 压电响应的影响及其与极化的关系
ACS Applied Electronic Materials ( IF 4.3 ) Pub Date : 2023-12-02 , DOI: 10.1021/acsaelm.3c01154
Huan Tan ₁ , Saúl Estandía ₁ , Florencio Sánchez ₁ , Ignasi Fina ₁

Affiliation

氧化铪的压电响应很有趣，因为它是一种 CMOS 兼容材料。众所周知，极化取决于斜方相的稳定性，而斜方相的稳定性又取决于几个参数，例如掺杂、应力和厚度。在此，考虑到这种多因素依赖性，研究了通过压电力显微镜表征的外延掺杂 HfO _{2薄膜中的压电响应。}分析了不同级别的 La 和 Zr 掺杂的影响、由衬底选择控制的应力效应的变化以及厚度效应对压电响应的影响。研究发现压电响应主要与极化相关，即主要由斜方相的量决定。有趣的是，对于表现出类似偏振的薄膜，观察到Zr 掺杂二氧化铪比La 掺杂产生更大的压电响应。_{发现纯ZrO 2}薄膜的压电响应最大；然而，压电力显微镜没有观察到实际的铁电响应，这表明一般趋势的例外。结论是，在样品显示大量斜方相的情况下，尖端半径效应引起的外在效应会影响压电响应幅度的评估。

"点击查看英文标题和摘要"

Effects of Doping, Stress, and Thickness on the Piezoelectric Response and Its Relation with Polarization in Ferroelectric HfO2

The piezoelectric response in hafnia is of interest because it is a CMOS-compatible material. It is known that polarization depends on the stabilization of the orthorhombic phase, which depends on several parameters, such as doping, stress, and thickness. Here, the piezoelectric response in epitaxial doped HfO₂ films characterized by piezoelectric force microscopy, is investigated considering this multifactorial dependence. The impact of different levels of La and Zr doping, variations of stress effects controlled by substrate selection, and thickness effects on piezoresponse is analyzed. It is found that the piezoelectric response is mainly correlated with the polarization, i.e., it is primarily determined by the amount of the orthorhombic phase. Interestingly, Zr doping of hafnia is observed to result in a larger piezoresponse than La doping for films showing similar polarization. The piezoresponse is found to be the greatest for the pure ZrO₂ film; however, the actual ferroelectric response is not observed by piezoelectric force microscopy, indicating an exception to the general tendency. It is concluded that in the case of samples showing larger amounts of the orthorhombic phase, extrinsic effects due to the tip radii effect can influence the evaluation of the amplitude of the piezoresponse.

更新日期：2023-12-02

点击分享查看原文

点击收藏

阅读更多本刊新发论文本刊介绍/投稿指南